THIN-FILM p-type ZnTe TRANSISTORS BY PHOTOLITHOGRAPHY

被引：0

作者：

Lastra, G. ^{[1
]}

Quevedo-Lopez, M. A. ^{[2
]}

Olivas, A. ^{[3
]}

机构：

[1] Ctr Nanociencias & Nanotecnol UNAM, PCeIM, Ensenada 22860, Baja California, Mexico

[2] Univ Texas Dallas, Dept Mat Sci & Engn, Richardson, TX 75080 USA

[3] Ctr Nanociencias & Nanotecnol UNAM, Ensenada 22860, Baja California, Mexico

来源：

CHALCOGENIDE LETTERS | 2014年 / 11卷 / 02期

关键词：

ZnTe; thin films; Cu doping; TFT; FIELD-EFFECT TRANSISTORS;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work, we built thin-film transistors, (TFTs), with a thickness of 75 nm of p-type ZnTe by photolithography. The paths were doped at 15 mg of CuN2O6-3H(2)O before depositing the contacts of Au and Ni to build source-drain of the TFTs. (I-D-V-D) curves were measured at different gate voltages, V-G and we had approximate value of the threshold voltage and mobility.

引用

页码：67 / 70

页数：4

共 12 条

[1] Complementary Thin-Film Electronics Based on n-Channel ZnO and p-Channel ZnTe [J].

Bowen, Willie E. ;

Wang, Weiming ;

Phillips, Jamie D. .

IEEE ELECTRON DEVICE LETTERS, 2009, 30 (12) :1314-1316

[2]

Gupta D., 2006, Indian Inst. Technol. Kanpur, P425

[3]

Hori T., 1997, GATE DIELECTRICS MOS

[4] AMORPHOUS-SILICON INTEGRATED-CIRCUIT [J].

MATSUMURA, M ;

HAYAMA, H .

PROCEEDINGS OF THE IEEE, 1980, 68 (10) :1349-1350

[5]

Miki H., 1987, MAT RES SOC S P, V95, P431

[6] AN AMORPHOUS-SILICON INTEGRATED INVERTER [J].

NARA, Y ;

MATSUMARA, M .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1982, 29 (10) :1646-1649

[7] Introduction to organic thin film transistors and design of n-channel organic semiconductors [J].

Newman, CR ;

Frisbie, CD ;

da Silva, DA ;

Brédas, JL ;

Ewbank, PC ;

Mann, KR .

CHEMISTRY OF MATERIALS, 2004, 16 (23) :4436-4451

[8]

Okumura F., 1983, 15 CSSDM, pB

[9] AU(PT)PD OHMIC CONTACTS TO P-ZNTE [J].

OZAWA, M ;

HIEI, F ;

ISHIBASHI, A ;

AKIMOTO, K .

ELECTRONICS LETTERS, 1993, 29 (05) :503-505

[10] APPLICATION OF AMORPHOUS-SILICON FIELD-EFFECT TRANSISTORS IN INTEGRATED-CIRCUITS [J].

SNELL, AJ ;

SPEAR, WE ;

LECOMBER, PG ;

MACKENZIE, K .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1981, 26 (02) :83-86

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