Electrical properties of ultra thin polymer films

被引:0
作者
Maeda, A
Zhu, L
Kato, T
Furuhashi, H
Yoshikawa, T
Ohashi, A
Kojima, K
Uchida, Y
Ochiai, S
Ieda, M
Mizutani, T
机构
来源
PROCEEDINGS OF THE 5TH INTERNATIONAL CONFERENCE ON PROPERTIES AND APPLICATIONS OF DIELECTRIC MATERIALS, VOLS 1 AND 2 | 1997年
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Ultra thin polyamide (PA) films (thickness : 2 similar to 3 nm) were deposited on a glass substrate by the vacuum evaporation method. PA-pellets inserted in a boron-silicated glass tube were evaporated by the heating with far infrared light under about 10(-4) Pa. The evaporating temperature is 285 degrees C. The substrate used was a micro cover slide glass. The distance between a evaporating source and a substrate was 30 cm. The glass substrate was kept at room temperature during the deposition. Evaporated PA thin film was annealed at 200 degrees C for one hour in nitrogen. The FT-IR spectrum of a ultra thin PA film (thin PA film) agreed well with that of a conventional PA film. This suggests that the thin PA film has a structure similar to a conventional PA film. The binding energies of O-18 and C-18 spectra shift to the higher energy side. This means that the thin PA film was slightly oxidized in the evaporation process. The breakdown strength and electrical conduction of a thin PA film were discussed. The conduction currents of 2.3 nm-thick film were measured under the application of DC 2.5 V which corresponds to 10 MV/cm. No self healing breakdown occurs until 8 MV/cm. This value is much higher than the breakdown strength of a conventional PA film (2.4 MV/cm). The conduction mechanism of a PA thin film annealed in vacuum were also discussed.
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页码:545 / 550
页数:6
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