Structural Properties of Thin Films Obtained by Magnetron Sputtering of Polydiacetylene

被引:6
作者
Streletskii, O. A. [1 ]
Zavidovskii, I. A. [1 ]
Nishchak, O. Yu. [1 ]
Shchegolikhin, A. N. [2 ]
Savchenko, N. F. [1 ]
机构
[1] Moscow MV Lomonosov State Univ, Moscow, Russia
[2] Russian Acad Sci, Emanuel Inst Biochem Phys, Moscow, Russia
关键词
polydiacetylene; magnetron sputtering; transmission electron microscopy; Raman spectroscopy; X-ray photoelectron spectroscopy; CARBON-FILMS; POLYMER-FILMS; RAMAN; DIAMOND; TEMPERATURE; SURFACES; CARBYNE; GROWTH; XPS;
D O I
10.1134/S1063783420110360
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Films obtained by radio-frequency sputtering of monocrystalline polydiacetylene (PDA) are under study. The structure is studied by Raman spectroscopy, transmission electron microscopy, and X-ray photoelectron spectroscopy. It is shown that the obtained films have a heterogeneous structure containing agglomerates of nanosized inclusions of the initial PDA and irregular sp/sp(2) hybridized carbon chain fragments.
引用
收藏
页码:2184 / 2190
页数:7
相关论文
共 56 条
[1]   GROUND-STATE ENERGIES OF ONE-ELECTRON AND 2-ELECTRON SILICON DOTS IN AN AMORPHOUS-SILICON DIOXIDE MATRIX [J].
BABIC, D ;
TSU, R ;
GREENE, RF .
PHYSICAL REVIEW B, 1992, 45 (24) :14150-14155
[2]   Hinged and chiral polydiacetylene carbon crystals [J].
Baughman, RH ;
Galvao, DS ;
Cui, C ;
Dantas, SO .
CHEMICAL PHYSICS LETTERS, 1997, 269 (3-4) :356-364
[3]   Rf magnetron sputtering of polytetrafluoroethylene under various conditions [J].
Biederman, H ;
Zeuner, M ;
Zalman, J ;
Bílková, P ;
Slavínská, D ;
Stelmasuk, V ;
Boldyreva, A .
THIN SOLID FILMS, 2001, 392 (02) :208-213
[4]   RF magnetron sputtering of polymers [J].
Biederman, H ;
Bilkova, P ;
Jezek, J ;
Hlidek, P ;
Slavinska, D .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1997, 218 :44-49
[5]   Evaporation factor in productivity increase of hot target magnetron sputtering systems [J].
Bleykher, G. A. ;
Borduleva, A. O. ;
Krivobokov, V. P. ;
Sidelev, D. V. .
VACUUM, 2016, 132 :62-69
[6]  
Cataldo F., 2005, POLYYNES SYNTHESIS P
[7]   Single-step, rapid low-temperature synthesis of Si quantum dots embedded in an amorphous SiC matrix in high-density reactive plasmas [J].
Cheng, Qijin ;
Xu, Shuyan ;
Ostrikov, Kostya .
ACTA MATERIALIA, 2010, 58 (02) :560-569
[8]   Plasma polymer films from sputtered polyimide [J].
Choukourov, A. ;
Hanus, J. ;
Kousal, J. ;
Grinevich, A. ;
Pihosh, Y. ;
Slavinska, D. ;
Biederman, H. .
VACUUM, 2006, 81 (04) :517-526
[9]  
[Данько Виктор Андреевич Dan’ko V.A.], 2013, [Известия высших учебных заведений. Материалы электронной техники, Izvestiya vysshikh uchebnykh zavedenii. Materialy elektronnoi tekhniki], P52, DOI 10.17073/1609-3577-2013-4-52-57
[10]   Super-Hydrophobic Coatings Prepared by RF Magnetron Sputtering of PTFE [J].
Drabik, Martin ;
Polonskyi, Oleksandr ;
Kylian, Ondrej ;
Cechvala, Juraj ;
Artemenko, Anna ;
Gordeev, Ivan ;
Choukourov, Andrei ;
Slavinska, Danka ;
Matolinova, Iva ;
Biederman, Hynek .
PLASMA PROCESSES AND POLYMERS, 2010, 7 (07) :544-551