Femtosecond and nanosecond laser polishing of rough polycrystalline diamond

被引：9
|
作者：
Komlenok, Maxim [1 ]
Pashinin, Vladimir [1 ]
Sedov, Vadim [1 ]
Konov, Vitaly [1 ]
机构：
[1] Russian Acad Sci, Prokhorov Gen Phys Inst, Vavilov St 38, Moscow, Russia
来源：
LASER PHYSICS | 2022年 / 32卷 / 08期
关键词：
laser polishing; ablation; polycrystalline diamond; FILMS; CVD;
D O I：
10.1088/1555-6611/ac732c
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The laser polishing of rough (roughness of 5 mu m) diamond plate using femtosecond and nanosecond pulses was realized for the first time. The effect of the angle of incidence, the number of passes, scanning speed, and laser fluence on the surface roughness was investigated and the optimal conditions were found. The initial roughness of the diamond plate was reduced by 5 times from 5 to 1 mu m for both femtosecond and nanosecond laser sources. The results indicate the prospects of laser polishing of rough polycrystalline diamond samples.
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页数：6
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