Deposition and characterization of titanium carbide thin films by magnetron sputtering using Ti and TiC targets

被引：43

作者：

Djafer, Amina Zouina Ait ^{[1
,2
]}

Saoula, Nadia ^{[1
]}

Madaoui, Noureddine ^{[1
]}

Zerizer, Abdellatif ^{[2
]}

机构：

[1] Ctr Dev Technol Avancees, Div Milieux Ionises & Lasers, Equipe Plasma Decharge, Algiers, Algeria

[2] UMBBoumerdes, Lab Mat Mineraux & Composites, Boumerdas, Algeria

来源：

APPLIED SURFACE SCIENCE | 2014年 / 312卷

关键词：

Thin films; Magnetron sputtering; Hard coatings; TiC; Hardness; MECHANICAL-PROPERTIES; STRUCTURAL-PROPERTIES; RAMAN-SCATTERING; SUBSTRATE BIAS; MICROSTRUCTURE; COATINGS; DC; NITRIDE; MULTILAYERS; HARDNESS;

D O I：

10.1016/j.apsusc.2014.05.084

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In this study we present the effect of negative bias applied to substrate and the pressure on the properties of TiC films (i.e. structure, Raman spectroscopy, electrical resistivity and hardness). The elaboration of our films has been carried out by RF-Magnetron Sputtering, 13.56 MHz, using two targets: titanium carbide and pure titanium. The film depositions have been done on silicon, glass and steel substrates. The total pressure was 10-60 mTorr. The attention was given to study the influence of different parameters, pressure and substrate-bias, on the properties of TiC layers. In this paper, a comparison between the properties of TiC prepared using pure titanium target and titanium carbide target is made. The deposited layers were characterized by XRD analysis, nanoindentation, four probe technique and Raman spectroscopy. (C) 2014 Elsevier B. V. All rights reserved.

引用

页码：57 / 62

页数：6

共 40 条

[11] Deposition of TiC films by dual source dc magnetron sputtering [J].

Inoue, S ;

Wada, Y ;

Koterazawa, K .

VACUUM, 2000, 59 (2-3) :735-741

[12]

Inoue S., 2006, ASEAN J SCI TECHNOL, V23, P239

[13] Amorphous and nanocrystalline titanium nitride and carbonitride materials obtained by solution phase ammonolysis of Ti(NMe2)4 [J].

Jackson, Andrew W. ;

Shebanova, Olga ;

Hector, Andrew L. ;

McMillan, Paul F. .

JOURNAL OF SOLID STATE CHEMISTRY, 2006, 179 (05) :1383-1393

[14] Raman Studies of Nano- and Ultra-nanocrystalline Diamond Films Grown by Hot-Filament CVD [J].

Klauser, Frederik ;

Steinmueller-Nethl, Doris ;

Kaindl, Reinhard ;

Bertel, Erminald ;

Memmel, Norbert .

CHEMICAL VAPOR DEPOSITION, 2010, 16 (4-6) :127-135

[15] RAMAN-SCATTERING INDUCED BY CARBON VACANCIES IN TICX [J].

KLEIN, MV ;

HOLY, JA ;

WILLIAMS, WS .

PHYSICAL REVIEW B, 1978, 17 (04) :1546-1556

[16]

Klug H. P., 1988, XRAY DIFFRACTION PRO

[17] Microstructural, mechanical and tribological analysis of nanocomposite Ti-C-N coatings deposited by industrial-scale DC magnetron sputtering [J].

Louring, S. ;

Madsen, N. D. ;

Sillassen, M. ;

Berthelsen, A. N. ;

Christensen, B. H. ;

Almtoft, K. P. ;

Ronkainen, H. ;

Nielsen, L. P. ;

Bottiger, J. .

SURFACE & COATINGS TECHNOLOGY, 2014, 245 :40-48

[18] Effects of residual stress on the mechanical and structural properties of TiC thin films grown by RF sputtering [J].

Mani, A ;

Aubert, P ;

Mercier, F ;

Khodja, H ;

Berthier, C ;

Houdy, P .

SURFACE & COATINGS TECHNOLOGY, 2005, 194 (2-3) :190-195

[19]

Mani A, 2003, MATER RES SOC SYMP P, V778, P201

[20] Influence of target material on the microstructure and properties of Ti-Si-N coatings prepared by r.f.-reactive sputtering [J].

Nose, M ;

Deguchi, Y ;

Honbo, E ;

Chiou, WA ;

Mae, T ;

Nogi, K .

MATERIALS TRANSACTIONS, 2005, 46 (08) :1911-1917

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