Microfabrication and Metal Plating Technologies on Polytetrafluoroethylene Film Surface Treated by Atmospheric-Pressure Nonthermal-Plasma Graft Polymerization Process

被引：9
|
作者：
Kuroki, Tomoyuki [1 ]
Tahara, Mitsuru [2 ]
Kuwahara, Takuya [3 ]
Okubo, Masaaki [1 ]
机构：
[1] Osaka Prefecture Univ, Dept Mech Engn, Sakai, Osaka 5998531, Japan
[2] Technol Res Inst Osaka Prefecture, Environm & Chem Dept, Izumi 5941157, Japan
[3] Nippon Inst Technol, Dept Prod Engn & Environm Management, Saitama 3458501, Japan
来源：
IEEE TRANSACTIONS ON INDUSTRY APPLICATIONS | 2014年 / 50卷 / 01期
关键词：
Fluoropolymer films; graft polymerization; metal plating; microfabrication; nonthermal plasma (NTP); surface treatment; GLOW-DISCHARGE; POLY(TETRAFLUOROETHYLENE); ADHESION; FABRICS;
D O I：
10.1109/TIA.2013.2271742
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Microfabrication by photolithography and nickel plating of fluoropolymer film, exposed to atmospheric-pressure nonthermal-plasma (NTP) graft polymerization, are investigated. Electroless nickel plating on the NTP-graft-polymerization-treated polytetrafluoroethylene (PTFE) film is successfully achieved. Highly adhesive nickel plating is obtained by reverse bend test. Furthermore, photolithographic patterns are formed on the plated PTFE film. This process is expected to be applied to flexible printed substrates and millimeter-wave antenna.
引用
收藏
页码：45 / 50
页数：6
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