Integration of ceramic catalyst on micro-thermoelectric gas sensor

被引：21

作者：

Shin, Woosuck ^{[1
]}

Nishibori, Maiko ^{[1
]}

Tajima, Kazuki ^{[1
]}

Houlet, Lionel F. ^{[1
]}

Choi, Yeongsoo ^{[1
]}

Izu, Noriya ^{[1
]}

Murayama, Norimitsu ^{[1
]}

Matsubara, Ichiro ^{[1
]}

机构：

[1] Adv Mfg Res Inst, AIST, Moriyama Ku, Nagoya, Aichi 4638560, Japan

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2006年 / 118卷 / 1-2期

关键词：

thermoelectric; hydrogen; ceramic catalyst; viscosity; CO poisoning;

D O I：

10.1016/j.snb.2006.04.033

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

An integration technique of dispensing ceramic paste containing the particles of Pt loaded on alumina (Pt/alumina) on thin membrane of microthermoelectric hydrogen sensor ( mu-THS) has been developed. By changing the concentration of the catalyst particles in the paste, the viscosity of the paste was controlled to prepare the thick film catalyst of different thicknesses. The thickness of the catalyst was closely related to both the gas sensing performance and its temperature dependency of the mu-THS device. The sensor device with the moderate concentration of the Pt/alumina catalyst particle in the paste, 3.8% (v/v), showed the voltage signal of ca. 10 mV for the gas mixture of hydrogen/air, I % (v/v) H-2 in air at catalyst temperature of 100 degrees C. The performances of the mu-THS with ceramic thick film catalyst and Pt thin film catalyst have been compared, and the influences of CO gas on their sensing performance have been investigated using in situ FT-IR test method. The better gas oxidation performance of the ceramic thick film than that of Pt thin film could remove out the adsorbed CO on the catalyst surface. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：283 / 291

页数：9

共 11 条

[1] Combustor of ceramic Pt/alumina catalyst and its application for micro-thermoelectric hydrogen sensor [J].

Choi, Y ;

Tajima, K ;

Shin, W ;

Izu, N ;

Matsubara, I ;

Murayama, N .

APPLIED CATALYSIS A-GENERAL, 2005, 287 (01) :19-24

[2] Nano-structured thin-film Pt catalyst for thermoelectric hydrogen gas sensor [J].

Matsumiya, M ;

Shin, W ;

Izu, N ;

Murayama, N .

SENSORS AND ACTUATORS B-CHEMICAL, 2003, 93 (1-3) :309-315

[3] Poisoning of platinum thin film catalyst by hexamethyldisiloxane (HMDS) for thermoelectric hydrogen gas sensor [J].

Matsumiya, M ;

Shin, WS ;

Qiu, FB ;

Izu, N ;

Matsubara, I ;

Murayama, N .

SENSORS AND ACTUATORS B-CHEMICAL, 2003, 96 (03) :516-522

[4] Hydrogen sensor based on RF-sputtered thermoelectric SiGe film [J].

Qiu, FB ;

Shin, W ;

Matsumiya, M ;

Izu, N ;

Murayama, N .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2003, 42 (4A) :1563-1567

[5] Effect of humidity on the sensing property of thermoelectric hydrogen sensor [J].

Sawaguchi, N ;

Shin, W ;

Izu, N ;

Matsubara, I ;

Murayama, N .

SENSORS AND ACTUATORS B-CHEMICAL, 2005, 108 (1-2) :461-466

[6] Planar catalytic combustor film for thermoelectric hydrogen sensor [J].

Shin, W ;

Tajima, K ;

Choi, YS ;

Izu, N ;

Matsubara, I ;

Murayama, N .

SENSORS AND ACTUATORS B-CHEMICAL, 2005, 108 (1-2) :455-460

[7] Hydrogen-selective thermoelectric gas sensor [J].

Shin, W ;

Matsumiya, M ;

Izu, N ;

Murayama, N .

SENSORS AND ACTUATORS B-CHEMICAL, 2003, 93 (1-3) :304-308

[8]

SHIN W, 2005, IN PRESS SENS ACTU A

[9] New catalyst for selective oxidation of CO in excess H2 designing of the active catalyst having different optimum temperature [J].

Shou, M ;

Tanaka, KI ;

Yoshioka, K ;

Moro-Oka, Y ;

Nagano, S .

CATALYSIS TODAY, 2004, 90 (3-4) :255-261

[10] Micro-thermoelectric hydrogen sensors with Pt thin film and Pt/alumina thick film catalysts [J].

Tajima, K ;

Choi, Y ;

Shin, W ;

Izu, N ;

Matsubara, I ;

Murayama, N .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2006, 153 (03) :H58-H62

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