Influence of temperature-dependent thermophysical properties of sapphire on the modeling of Kyropoulos cooling process

被引:13
作者
Jin, Z. L. [1 ]
Fang, H. S. [1 ]
Yang, N. [1 ]
Zhang, Z. [1 ]
Wang, S. [1 ]
Xu, J. F. [2 ]
机构
[1] Huazhong Univ Sci & Technol, Sch Energy & Power Engn, Wuhan 430074, Peoples R China
[2] Huazhong Univ Sci & Technol, Sch Mech Sci & Engn, Wuhan 430074, Peoples R China
基金
中国国家自然科学基金;
关键词
Thermophysical properties; Numerical sinmlation; Kyropoulos; Sapphire; CRYSTAL-GROWTH; INTERFACE SHAPE; SEEDING PROCESS; HEAT-TRANSPORT; FLUID-FLOW; MELT;
D O I
10.1016/j.jcrysgro.2014.07.049
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Sapphire is widely used as substrates in semiconductor industry. Kyropoulos (Ky) method is the most popular technique to grow large-size and substrate-quality sapphire single crystals. Computational modeling is a powerful tool to analyze the growth conditions for the improvement of this crystal growth. for simulation, thermophysical properties of sapphire are usually set constant, which may increase the deviation between experiments and modeling results. In this paper, temperature-dependent properties of sapphire, i.e., heat capacity, thermal conductivity, and thermal expansion coefficient, are summarized and adopted in the simulation studies. Their effects On the predicted results are discussed for the cooling process, during which large temperature change in the crystal leads to big differences of the material properties. Comparative analysis tells that temperature difference and thermal stress can be more than 200 K and 4 MPa for the cases with or without consideration of the temperature-dependence of the properties. Consequently, it is necessary to consider the impact of material properties on the accuracy of numerical simulation during the sapphire single crystal growth. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码:52 / 58
页数:7
相关论文
共 25 条
  • [21] Influence of the crucible bottom shape on the heat transport and fluid flow during the seeding process of oxide Czochralski crystal growth
    Tavakoli, M. H.
    Wilke, H.
    Crnogorac, N.
    [J]. CRYSTAL RESEARCH AND TECHNOLOGY, 2007, 42 (12) : 1252 - 1258
  • [22] Numerical study of heat transport and fluid flow of melt and gas during the seeding process of sapphire Czochralski crystal growth
    Tavakoli, Mohammad Hossein
    [J]. CRYSTAL GROWTH & DESIGN, 2007, 7 (04) : 644 - 651
  • [23] On the factors affecting the isotherm shape during Bridgman growth of semi-transparent crystals
    Vizman, D
    Nicoara, I
    Nicoara, D
    [J]. JOURNAL OF CRYSTAL GROWTH, 1996, 169 (01) : 161 - 169
  • [24] Preparation, quality characterization, service performance evaluation and its modification of sapphire crystal for optical window and dome application
    Wang, Guigen
    Zuo, Hongbo
    Zhang, Huayu
    Wu, Qibao
    Zhang, Mingfu
    He, Xiaodong
    Hu, Zhaohui
    Zhu, Lin
    [J]. MATERIALS & DESIGN, 2010, 31 (02) : 706 - 711
  • [25] White G. K., 1983, High Temperatures - High Pressures, V15, P321