Lithographically defined aluminum nitride cross-sectional Lame mode resonators

被引：13

作者：

Chen, G. ^{[1
]}

Cassella, C. ^{[1
]}

Qian, Z. ^{[1
]}

Hummel, G. E. ^{[1
]}

Rinaldi, M. ^{[1
]}

机构：

[1] Northeastern Univ, Boston, MA 02115 USA

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2017年 / 27卷 / 03期

关键词：

acoustic resonators; aluminum nitride; electromechanical coupling coefficient; filters;

D O I：

10.1088/1361-6439/aa5a83

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on aluminum nitride (AlN) cross-sectional Lame mode resonators (CLMRs) showing high electromechanical coupling coefficient (k(t)(2)) in excess of 4% in a lithographically defined 307 MHz frequency range around 920 MHz. In addition, we report the performance of a CLMR showing a figure of merit (FoM, defined as the product of quality factor, Q, and k(t)(2)) in excess of 85. To the best of the authors' knowledge, such FoM value is the highest reported for AlN resonators using interdigitated metal electrodes (IDTs).

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页数：7

相关论文

共 14 条

[1] Cross-Sectional Lame Mode Ladder Filters for UHF Wideband Applications [J].

Cassella, Cristian ;

Chen, Guofeng ;

Qian, Zhenyun ;

Hummel, Gwendolyn ;

Rinaldi, Matteo .

IEEE ELECTRON DEVICE LETTERS, 2016, 37 (05) :681-683

[2] Aluminum Nitride Cross-Sectional Lame Mode Resonators [J].

Cassella, Cristian ;

Hui, Yu ;

Qian, Zhenyun ;

Hummel, Gwendolyn ;

Rinaldi, Matteo .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2016, 25 (02) :275-285

[3] AlN Two-Dimensional-Mode Resonators for Ultra-High Frequency Applications [J].

Cassella, Cristian ;

Piazza, Gianluca .

IEEE ELECTRON DEVICE LETTERS, 2015, 36 (11) :1192-1194

[4] Quality Factor Dependence on the Inactive Regions in AlN Contour-Mode Resonators [J].

Cassella, Cristian ;

Singh, Navab ;

Soon, Bo Woon ;

Piazza, Gianluca .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2015, 24 (05) :1575-1582

[5]

Chen G, 2016, 2016 IEEE INT FREQ C

[6]

Hui Y, 2013, JOINT CONF IEEE INT, P930, DOI 10.1109/EFTF-IFC.2013.6702272

[7] Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators [J].

Piazza, Gianluca ;

Stephanou, Philip J. ;

Pisano, Albert P. .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2006, 15 (06) :1406-1418

[8]

Rinaldi Matteo, 2010, 2010 International Ultrasonics Symposium, P1494, DOI 10.1109/ULTSYM.2010.0379

[9] Reconfigurable CMOS Oscillator Based on Multifrequency AlN Contour-Mode MEMS Resonators [J].

Rinaldi, Matteo ;

Zuo, Chengjie ;

Van der Spiegel, Jan ;

Piazza, Gianluca .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 2011, 58 (05) :1281-1286

[10] Gravimetric Chemical Sensor based on the Direct Integration of SWNTs on AlN Contour-Mode MEMS Resonators [J].

Rinaldi, Matteo ;

Zuniga, Chiara ;

Sinha, Nipun ;

Taheri, Marzie ;

Piazza, Gianluca ;

Khamis, Samuel M. ;

Johnson, A. T. .

2008 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, VOLS 1 AND 2, 2008, :443-+