Single liquid precursor delivery photo-assisted metalorganic chemical vapor deposition of high quality YBa2CU3O7-x thin/thick films

High quality superconducting YBa2Cu3O7-x (YBCO) films were deposited on LaAlO3 (1 0 0) substrates at a high growth rates of 0.2-1 mum/min with high reproducibility by a novel photo-assisted metalorganic chemical vapor deposition process with single liquid precursor delivery technique. The photo irradiation technique can dramatically increase the growth rate and the single liquid precursor delivery technique can significantly improve the process reproducibility. X-ray diffraction analysis indicated that single phase, c-axis oriented and well ab-aligned YBCO films were high reproducibly prepared. The as-grown YBCO films showed critical temperatures (T-c) of 91 K with the transition width (DeltaT(c)) less than I K, and self-field critical current densities (J(c)) of 4.6 x 10(6) A/cm(2) at 77 K. (C) 2001 Elsevier Science B.V. All rights reserved.