Electro-optic modulation in crystal-ion-sliced z-cut LiNbO3 thin films

被引：75

作者：

Ramadan, TA ^{[1
]}

Levy, M ^{[1
]}

Osgood, RM ^{[1
]}

机构：

[1] Columbia Univ, Microelect Sci Labs, New York, NY 10027 USA

来源：

APPLIED PHYSICS LETTERS | 2000年 / 76卷 / 11期

关键词：

D O I：

10.1063/1.126046

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Electro-optic modulation is demonstrated in 10-mu m-thick single-crystal LiNbO3 films obtained by crystal ion slicing. This technique uses ion implantation of single-crystal bulk samples followed by selective etching. The measured electro-optic response of these films is comparable, within experimental error, to that of single-crystal bulk LiNbO3 and is superior to previously reported values for epitaxial polycrystalline thin films. The product of half-wave voltage and modulator length, VpiL, is 8 V cm. Post lift-off annealing is shown to be of key importance in improving the modulator extinction ratio. (C) 2000 American Institute of Physics. [S0003-6951(00)01211-0].

引用

页码：1407 / 1409

页数：3

共 10 条

[1] OPTICALLY INDUCED DRIFT EFFECTS IN LITHIUM-NIOBATE ELECTROOPTIC WAVE-GUIDE DEVICES OPERATING AT A WAVELENGTH OF 1.51-MU-M
BEAUMONT, AR
ATKINS, CG
BOOTH, RC
[J]. ELECTRONICS LETTERS, 1986, 22 (23) : 1260 - 1261
[2] GROWTH OF THIN-FILMS OF LITHIUM-NIOBATE BY CHEMICAL VAPOR-DEPOSITION
CURTIS, BJ
BRUNNER, HR
[J]. MATERIALS RESEARCH BULLETIN, 1975, 10 (06) : 515 - 520
[3] SPUTTERED THIN-FILMS FOR INTEGRATED OPTICS
DEITCH, RH
WEST, EJ
GIALLORENZI, TG
WELLER, JF
[J]. APPLIED OPTICS, 1974, 13 (04) : 712 - 715
[4] LINEAR ELECTRO-OPTIC EFFECT IN SPUTTERED POLYCRYSTALLINE LINBO3 FILMS
GRIFFEL, G
RUSCHIN, S
CROITORU, N
[J]. APPLIED PHYSICS LETTERS, 1989, 54 (15) : 1385 - 1387
[5] Fabrication of single-crystal lithium niobate films by crystal ion slicing
Levy, M
Osgood, RM
Liu, R
Cross, LE
Cargill, GS
Kumar, A
Bakhru, H
[J]. APPLIED PHYSICS LETTERS, 1998, 73 (16) : 2293 - 2295
[6] Large etch-selectivity enhancement in the epitaxial liftoff of single-crystal LiNbO3 films
Radojevic, AM
Levy, M
Osgood, RM
Kumar, A
Bakhru, H
Tian, C
Evans, C
[J]. APPLIED PHYSICS LETTERS, 1999, 74 (21) : 3197 - 3199
[7] Saleh B. E. A., 2007, FUNDAMENTALS PHOTONI
[8] EPITAXIAL-GROWTH OF LINBO3 THIN-FILMS BY EXCIMER LASER ABLATION METHOD AND THEIR SURFACE ACOUSTIC-WAVE PROPERTIES
SHIBATA, Y
KAYA, K
AKASHI, K
KANAI, M
KAWAI, T
KAWAI, S
[J]. APPLIED PHYSICS LETTERS, 1992, 61 (08) : 1000 - 1002
[9] LITHIUM-NIOBATE - SUMMARY OF PHYSICAL-PROPERTIES AND CRYSTAL-STRUCTURE
WEIS, RS
GAYLORD, TK
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1985, 37 (04): : 191 - 203
[10] EXTRA STRANGE MODES IN ION-IMPLANTED LITHIUM-NIOBATE WAVE-GUIDES
ZHANG, L
CHANDLER, PJ
TOWNSEND, PD
[J]. JOURNAL OF APPLIED PHYSICS, 1991, 70 (03) : 1185 - 1189

← 1 →