Development of a Novel Parasitic-Type Piezoelectric Actuator

被引：152

作者：

Li, Jianping ^{[1
]}

Zhou, Xiaoqin ^{[1
]}

Zhao, Hongwei ^{[1
]}

Shao, Mingkun ^{[1
]}

Li, Ning ^{[1
]}

Zhang, Shizhong ^{[1
]}

Du, Yumeng ^{[1
]}

机构：

[1] Jilin Univ, Sch Mech Sci & Engn, Changchun 130025, Peoples R China

来源：

IEEE-ASME TRANSACTIONS ON MECHATRONICS | 2017年 / 22卷 / 01期

基金：

中国国家自然科学基金;

关键词：

Actuator; flexure hinge; parasitic; piezoelectric; DESIGN; STAGE; SYSTEM;

D O I：

10.1109/TMECH.2016.2604242

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A piezoelectric actuator based on parasitic motion principle is proposed and tested. The piezoelectric actuator is explored to simultaneously realize coarse (long stroke) and fine (high accuracy) motions using dual-servo control method. The working principle of the proposed piezoelectric actuator is discussed, and finite-element method is adopted. A dynamic model of parasitic motion based on the LuGre friction model is simulated using matlab/Simulink. A prototype is manufactured to investigate working performance. Experimental results indicate that the maximum speed of the presented parasitic-type piezoelectric actuator is 7.95 mm/s and the resolution is 10 nm. These findings confirm the feasibility of the dual-servo nanopositioning system using piezoelectric stacks and flexure hinges.

引用

页码：541 / 550

页数：10

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