Development of a Novel Parasitic-Type Piezoelectric Actuator

被引：152

作者：

Li, Jianping ^{[1
]}

Zhou, Xiaoqin ^{[1
]}

Zhao, Hongwei ^{[1
]}

Shao, Mingkun ^{[1
]}

Li, Ning ^{[1
]}

Zhang, Shizhong ^{[1
]}

Du, Yumeng ^{[1
]}

机构：

[1] Jilin Univ, Sch Mech Sci & Engn, Changchun 130025, Peoples R China

来源：

IEEE-ASME TRANSACTIONS ON MECHATRONICS | 2017年 / 22卷 / 01期

基金：

中国国家自然科学基金;

关键词：

Actuator; flexure hinge; parasitic; piezoelectric; DESIGN; STAGE; SYSTEM;

D O I：

10.1109/TMECH.2016.2604242

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A piezoelectric actuator based on parasitic motion principle is proposed and tested. The piezoelectric actuator is explored to simultaneously realize coarse (long stroke) and fine (high accuracy) motions using dual-servo control method. The working principle of the proposed piezoelectric actuator is discussed, and finite-element method is adopted. A dynamic model of parasitic motion based on the LuGre friction model is simulated using matlab/Simulink. A prototype is manufactured to investigate working performance. Experimental results indicate that the maximum speed of the presented parasitic-type piezoelectric actuator is 7.95 mm/s and the resolution is 10 nm. These findings confirm the feasibility of the dual-servo nanopositioning system using piezoelectric stacks and flexure hinges.

引用

页码：541 / 550

页数：10

共 29 条

[1] A high resolution long travel friction-drive micropositioner with programmable step size [J].

Chang, SH ;

Li, SS .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1999, 70 (06) :2776-2782

[2] A High-Precision Dual-Servo Stage Using Halbach Linear Active Magnetic Bearings [J].

Choi, Young-Man ;

Gweon, Dae-Gab .

IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2011, 16 (05) :925-931

[3] A NEW MODEL FOR CONTROL OF SYSTEMS WITH FRICTION [J].

DEWIT, CC ;

OLSSON, H ;

ASTROM, KJ ;

LISCHINSKY, P .

IEEE TRANSACTIONS ON AUTOMATIC CONTROL, 1995, 40 (03) :419-425

[4] Piezoelectric microactuator for dual stage control [J].

Evans, RB ;

Griesbach, JS ;

Messner, WC .

IEEE TRANSACTIONS ON MAGNETICS, 1999, 35 (02) :977-982

[5] Dual-Stage Vertical Feedback for High-Speed Scanning Probe Microscopy [J].

Fleming, Andrew J. .

IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, 2011, 19 (01) :156-165

[6] Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning [J].

Guo, Z. ;

Tian, Y. ;

Liu, C. ;

Wang, F. ;

Liu, X. ;

Shirinzadeh, B. ;

Zhang, D. .

ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING, 2015, 32 :93-105

[7] Development of compact high precision linear piezoelectric stepping positioner with nanometer accuracy and large travel range [J].

Kang, Dongwoo ;

Lee, Moon G. ;

Gweon, Daegab .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2007, 78 (07)

[8] Dual-stage actuator system for magnetic disk drives using a shear mode piezoelectric microactuator [J].

Koganezawa, S ;

Uematsu, Y ;

Yamada, T ;

Nakano, H ;

Inoue, J ;

Suzuki, T .

IEEE TRANSACTIONS ON MAGNETICS, 1999, 35 (02) :988-992

[9] Precision nano-alignment system using machine vision with motion controlled by piezoelectric motor [J].

Kuo, W. M. ;

Chuang, S. F. ;

Nian, C. Y. ;

Tarng, Y. S. .

MECHATRONICS, 2008, 18 (01) :21-34

[10]

Kwon S, 2001, IEEE INT CONF ROBOT, P121, DOI 10.1109/ROBOT.2001.932540

← 1 2 3 →