Controlling Epitaxial GaAsxP1-x/Si1-yGey Heterovalent Interfaces

被引:5
|
作者
Sharma, P. [1 ]
Milakovich, T. [1 ]
Bulsara, M. T. [1 ]
Fitzgerald, E. A. [1 ]
机构
[1] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA
关键词
GE;
D O I
10.1149/05009.0333ecst
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
High quality epitaxial growth of GaAs(x)P(1-)x on SiyGe1-y templates would allow access to materials and band gaps that would enable novel, high performance devices on Si. However, GaAsxP1-x/Si1-yGey interface engineering has proved to be very complex. In this paper, we explore the effects of strain at the heterovalent interface between GaAsxP1-x and Si1-yGey alloys on the overall defect morphology.
引用
收藏
页码:333 / 337
页数:5
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