Large-scale production of high purity (99.999%), nano-twinned, and ultrafine-grained copper foils (22 mu m thick) was successfully implemented by the use of nanoscale multilayer technology. The process allows the production of up to fourteen 10 cm diameter foils during a single deposition run with high levels of reproducibility. Mechanical tests demonstrate that the strength of the Cu foils (alpha(y) similar to 540-690 MPa) compares favorably to ultratine-grained copper samples produced by other methods. (c) 2006 Elsevier B.V. All rights reserved.