Phase modulated spectroscopic ellipsometry of dielectric multilayer beam combiner

被引：9

作者：

Bhattacharyya, D ^{[1
]}

Sahoo, NK ^{[1
]}

Thakur, S ^{[1
]}

Das, NC ^{[1
]}

机构：

[1] Bhabha Atom Res Ctr, Div Spect, Bombay 400085, Maharashtra, India

来源：

THIN SOLID FILMS | 2002年 / 416卷 / 1-2期

关键词：

spectroscopic ellipsometry; dielectric; beam;

D O I：

10.1016/S0040-6090(02)00729-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An algorithm to characterise multilayer optical coatings with large numbers of layers by spectroscopic ellipsometry, using a discrete spectral-zone fitting approach, has been demonstrated by characterising a 27-layer TiO2/SiO2 multilayer beam combiner in the wavelength range of 280-1200 nm. The ellipsometric spectra are fitted first in the wavelength regime of 700-1200 nm and the sample structure was determined. TiO2 and SiO2 layers have been assumed to be transparent in this wavelength regime with dispersion-less refractive indices. The data were then fitted in the wavelength range of 280-340 nm to find the dispersion relation for the optical constants of TiO2. Finally, the fitting has been done in the wavelength range of 340-700 nm and the true dispersion of refractive index of TiO2 along with the best fit sample structure have been obtained. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：97 / 105

页数：9

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