Mask-Free Patterning of High-Conductivity Metal Nanowires in Open Air by Spatially Modulated Femtosecond Laser Pulses

被引：90

作者：

Wang, Andong ^{[1
]}

Jiang, Lan ^{[1
]}

Li, Xiaowei ^{[1
]}

Liu, Yang ^{[1
]}

Dong, Xianzi ^{[2
,3
]}

Qu, Liangti ^{[4
]}

Duan, Xuanming ^{[2
,3
]}

Lu, Yongfeng ^{[5
]}

机构：

[1] Beijing Inst Technol, Sch Mech Engn, Laser Micro Nanofabricat Lab, Beijing 100081, Peoples R China

[2] Chinese Acad Sci, Tech Inst Phys & Chem, Lab Organ Nanophoton, Beijing 100190, Peoples R China

[3] Chinese Acad Sci, Tech Inst Phys & Chem, Key Lab Photochem Convent & Funct Mat, Beijing 100190, Peoples R China

[4] Beijing Inst Technol, Sch Chem, Key Lab Cluster Sci,Minist Educ, Beijing Key Lab Photoelectronic Elect Convers Mat, Beijing 100081, Peoples R China

[5] Univ Nebraska, Dept Elect Engn, Lincoln, NE 68588 USA

来源：

ADVANCED MATERIALS | 2015年 / 27卷 / 40期

基金：

中国国家自然科学基金;

关键词：

femtosecond lasers; nanowires; spatially modulated beams; thin film ablation; NANOPARTICLE INK; AU NANOWIRE; KNIFE-EDGE; FILMS; FABRICATION; SURFACE; MANIPULATION; ELECTRONICS; ABLATION; SILICON;

D O I：

10.1002/adma.201503289

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A novel high-resolution nanowire fabrication method is developed by thin-film patterning using a spatially modulated femtosecond laser pulse. Deep subwavelength (approximate to 1/13 of the laser wavelength) and high conductivity (approximate to 1/4 of the bulk gold) nanowires are fabricated in the open air without using masks, which offers a single-step arbitrary direct patterning approach for electronics, plasmonics, and optoelectronics nanodevices.

引用

页码：6238 / 6243

页数：6

共 4 条

[1] Mask-free patterning of Cu mesh as smart windows by spatially modulated nanosecond laser pulses
Zhang, Qingwei
Huang, Donglin
Qi, Dongfeng
Zhou, Wenju
Wang, Letian
Zhang, Zifeng
Chen, Songyan
Dai, Shixun
Zheng, Hongyu
OPTICS AND LASER TECHNOLOGY, 2021, 140
[2] Nanoscale material redistribution induced by spatially modulated femtosecond laser pulses for flexible high-efficiency surface patterning
Wang, Andong
Jiang, Lan
Li, Xiaowei
Xu, Zhijie
Huang, Lingling
Zhang, Kaihu
Ji, Xu
Lu, Yongfeng
OPTICS EXPRESS, 2017, 25 (25): : 31431 - 31442
[3] Laser-assisted mask-free patterning strategy for high-performance hybrid micro-supercapacitors with 3D current collectors
Xie, Yi
Zhang, Jihai
Xu, Haoran
Zhou, Tao
CHEMICAL ENGINEERING JOURNAL, 2022, 437
[4] Splashing-Assisted Femtosecond Laser-Activated Metal Deposition for Mold- and Mask-Free Fabrication of Robust Microstructured Electrodes for Flexible Pressure Sensors
Ji, Yaqiang
Zhang, Yuan
Zhu, Jiaqi
Geng, Pai
Halpert, Jonathan E. E.
Guo, Liang
SMALL, 2023, 19 (24)

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