60 keV Ar+-ion induced modification of microstructural, compositional, and vibrational properties of InSb

被引：14

作者：

Datta, D. P. ^{[1
]}

Garg, S. K. ^{[1
]}

Satpati, B. ^{[2
]}

Sahoo, P. K. ^{[3
]}

Kanjilal, A. ^{[4
]}

Dhara, S. ^{[5
]}

Kanjilal, D. ^{[6
]}

Som, T. ^{[1
]}

机构：

[1] Inst Phys, SUNAG Lab, Bhubaneswar 751005, Odisha, India

[2] Saha Inst Nucl Phys, Surface Phys & Mat Sci Div, Kolkata 700064, India

[3] Natl Inst Sci Educ & Res, Sch Phys Sci, Bhubaneswar 751005, Odisha, India

[4] Shiv Nadar Univ, Dept Phys, Greater Noida 203207, Uttar Pradesh, India

[5] Indira Gandhi Ctr Atom Res, Surface & Nanosci Div, Mat Sci Grp, Kalpakkam 603102, Tamil Nadu, India

[6] Interuniv Accelerator Ctr, Aruna Asaf Ali Marg, New Delhi 110067, India

来源：

JOURNAL OF APPLIED PHYSICS | 2014年 / 116卷 / 14期

关键词：

NANOWIRE ARRAYS; RAMAN; FABRICATION; ANTIMONIDE; EVOLUTION; NETWORK; SURFACE;

D O I：

10.1063/1.4897537

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Room temperature irradiation of InSb(111) by 60 keV Ar+-ions at normal (0 degrees) and oblique (60 degrees) angles of incidence led to the formation of nanoporous structure in the high fluence regime of 1 x 10(17) to 3 x 10(18) ions cm(-2). While a porous layer comprising of a network of interconnected nanofibers was generated by normal ion incidence, evolution of plate-like structures was observed for obliquely incident ions. Systematic studies of composition and structure using energy dispersive x-ray spectroscopy, Raman spectroscopy, x-ray photoelectron spectroscopy, Raman mapping, grazing incidence x-ray diffraction, and cross-sectional transmission electron microscopy revealed a high degree of oxidation of the ion-induced microstructures with the presence of In2O3 and Sb2O3 phases and presence of nanocrystallites within the nanoporous structures. The observed structural evolution was understood in terms of processes driven by ion-induced defect accumulation within InSb. (C) 2014 AIP Publishing LLC.

引用

页数：10

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