Structure and characterization of ZnO thin film prepared by spin coating

被引：2

作者：

Ma, Guangpeng ^{[1
]}

Han, Jianru ^{[1
]}

Yang, Changhong ^{[1
]}

Xu, Hongyan ^{[1
]}

Yang, Dongmei ^{[1
]}

Gu, Shengli ^{[1
]}

Jiang, Fiyi ^{[1
]}

机构：

[1] Shandong Univ, State Key Lab Crystal Mat, Jinan 250100, Peoples R China

来源：

SURFACE REVIEW AND LETTERS | 2006年 / 13卷 / 01期

基金：

中国国家自然科学基金;

关键词：

zinc oxide thin films; spin coating; sol-gel method; optical transmission;

D O I：

10.1142/S0218625X06007779

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

ZnO thin films were prepared on silica glass substrates by a sol-gel spin coating technique. The thickness of the films was about 200 nm. At 370 nm in the ultraviolet region, there is a sharp absorption edge that corresponds to the ZnO intrinsic band gap of 3.30 eV. The structural properties of the films were examined by X-ray diffraction, which demonstrates that the ZnO films were c-axis oriented. From the infrared spectrum, we conclude that ZnO was deposited on silica glass substrates through a high temperature process at 700 degrees C.

引用

页码：13 / 15

页数：3

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