Electrical and Optical Properties of Multi-Layered (ITO/Ag/ITO)n Transparent Conductive Films Grown onto PET Substrates

被引：3

作者：

Jung, Sang Kooun ^{[1
]}

Sohn, Sang Ho ^{[1
]}

机构：

[1] Kyungpook Natl Univ, Dept Phys, Taegu 702701, South Korea

来源：

MOLECULAR CRYSTALS AND LIQUID CRYSTALS | 2009年 / 513卷

关键词：

Ag; electrical; indium tin oxide; optical; sheet resistance; sputtering;

D O I：

10.1080/15421400903217066

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Transparent conductive films having the sandwich structure of indium tin oxide/silver/indium tin oxide (ITO/Ag/ITO) and indium tin oxide/silver/indium tin oxide/silver/indium tin oxide (ITO/Ag/ITO/Ag/ITO) were grown onto PET substrates by a radio frequency magnetron sputtering method at the room temperature. The electrical and optical properties of the ITO/Ag/ITO films were compared with those of ITO/Ag/ITO/Ag/ITO films. Under optimal deposition conditions, thin films of ITO/Ag/ITO/Ag/ITO with a sheet resistance of 10.8 Omega/gamma and an optical transmittance of over 60% in the visible spectrum range and an optical reflectance of under 20% in the visible spectrum range were achieved. This work provides better initial understanding of the relationship between sputter process conditions and their influence on electrical and mechanical performance.

引用

页码：301 / 310

页数：10

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