A Cantilever-Type Uncooled Infrared Detector With High Fill-Factor and Low-Noise Characteristic

被引：5

作者：

Kwon, Il Woong ^{[1
]}

Son, Hyuck Jun ^{[1
]}

Kim, Dong Soo ^{[1
]}

Hwang, Chi Ho ^{[1
]}

Lee, Yong Soo ^{[1
]}

Yu, Byung-Gon ^{[2
]}

Lee, Hee Chul ^{[1
,3
]}

机构：

[1] Korea Adv Inst Sci & Technol, Div Elect Engn, Sch Elect Engn & Comp Sci, Taejon 305701, South Korea

[2] Elect & Telecommun Res Inst, IT Convergence & Components Lab, Taejon 305700, South Korea

[3] Natl Nanofab Ctr, Taejon 305806, South Korea

来源：

IEEE ELECTRON DEVICE LETTERS | 2009年 / 30卷 / 06期

关键词：

Fill factor; microcantilever-type infrared (IR) detector; noise-equivalent temperature difference (NETD); thermomechanical noise (TM-noise); PERFORMANCE;

D O I：

10.1109/LED.2009.2013221

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A capacitive microcantilever-type infrared (IR) detector having a unique structure that has high immunity to thermomechanical noise (TM-noise) is proposed. The device has a capacitive readout scheme and is compared with a conventional design using the same readout method by finite element model simulation. The total cantilever length was halved, compared with the conventional device structure, in order to increase the device's spring constant, and the IR absorber area was consequently increased as the portion of the leg in the given pixel area is decreased. Large spring constant and increased absorber area are the main causes of the TM-noise reduction. The feasibility of the device was shown by fabrication, and measured parameters demonstrated the structure's superiority. It was shown that the proposed structure potentially has low TM-noise and an overall noise-equivalent temperature difference (NETD) value that is lower than that of the conventional designed device. The NETD of the proposed device was found to be 5.7 mK.

引用

页码：635 / 637

页数：3

共 10 条

[1] An uncooled IR imager with 5 mK NEDT [J].

Amantea, R ;

Knoedler, CM ;

Pantuso, FP ;

Patel, VK ;

Sauer, DJ ;

Tower, JR .

INFRARED TECHNOLOGY AND APPLICATIONS XXIII, PTS 1 AND 2, 1997, 3061 :210-222

[2] Performance of uncooled microcantilever thermal detectors [J].

Datskos, PG ;

Lavrik, NV ;

Rajic, S .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2004, 75 (04) :1134-1148

[3]

Gregory Kovacs T.A, 1998, Micromachined Transducers Sourcebook

[4]

HUNTER SR, 2006, P SPIE, V6206

[5] High sensitivity 25 μm microbolometer FPAs [J].

Murphy, D ;

Ray, M ;

Wyles, R ;

Asbrock, J ;

Lum, N ;

Wyles, J ;

Hewitt, C ;

Kennedy, A ;

Van Lue, D ;

Anderson, J ;

Bradley, D ;

Chin, R ;

Kostrzewa, T .

INFRARED TECHNOLOGY AND APPLICATIONS XXV111, PTS 1 AND 2, 2003, 4820 :208-219

[6]

Sarid D., 1991, SCANNING FORCE MICRO, V1st

[7]

WATCHER EA, 1996, REV SCI INSTRUM, V67, P3434

[8]

WOOD RA, 1997, UNCOOLED INFRARED AR

[9] High sensitivity photomechanical MW-LWIR imaging using an uncooled MEMS microcantilever array and optical readout [J].

Zhao, J .

INFRARED TECHNOLOGY AND APPLICATIONS XXXI, PTS 1 AND 2, 2005, 5783 :506-513

[10] Optomechanical uncooled infrared imaging system: Design, microfabrication, and performance [J].

Zhao, Y ;

Mao, MY ;

Horowitz, R ;

Majumdar, A ;

Varesi, J ;

Norton, P ;

Kitching, J .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2002, 11 (02) :136-146

← 1 →