Low-Temperature Cyclonic Plasma Created at Atmospheric Pressure

被引:8
|
作者
Huang, Chun [1 ]
Liu, Chi-Hung [2 ]
Wu, Shin-Yi [1 ]
Chen, Tai-Hung [3 ]
Teng, Jyh-Tong [3 ]
Su, Chun-Hsien [2 ]
Chen, Chih-Ming [2 ]
机构
[1] Yuan Ze Univ, Dept Chem Engn & Mat Sci, Yuan Ze Fuel Cell Ctr, Chungli 32003, Taiwan
[2] Ind Technol Res Inst, Mech & Syst Res Labs, Hsinchu 31040, Taiwan
[3] Chung Yuan Christian Univ, Dept Mech Engn, Chungli 32023, Taiwan
关键词
Atmospheric pressure plasma; plasma applications; plasma devices; surface modification;
D O I
10.1109/TPS.2009.2015323
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Cyclonic atmospheric pressure plasma with low-temperature nature has been investigated. High-speed rotating nonthermal atmospheric plasma jets were utilized as RF plasma sources to provide the gas velocities required to generate the cyclonic gas flow patterns. It was shown that the plasma temperature could be controlled by operational parameters. The experimentally measured gas phase temperature was around 30 degrees C-85 degrees C, indicating that this cyclonic atmospheric pressure plasma can treat polymers without unfavorable thermal effects. This type of low-temperature atmospheric plasma can provide a novel technique for large-scale surface modification of heat-sensitive materials.
引用
收藏
页码:1169 / 1171
页数:3
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