Boosting the Dynamic Range for Electrochemical Sensing of Hydrogen Peroxide by Enhanced Integration of Pd Nanoparticles in 3D Porous Si Framework

被引:3
作者
Wang, Zi [1 ]
Bi, Yunke [2 ]
机构
[1] Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China
[2] Shanghai Jiao Tong Univ, Sch Med, Shanghai Peoples Hosp 1, Dept Neurosurg, Shanghai 201620, Peoples R China
基金
中国国家自然科学基金;
关键词
hydrogen peroxide; electrochemical sensor; porous silicon; metal-assisted chemical etching; hierarchical structure; GALVANIC DISPLACEMENT; SILICON; FABRICATION; NANOSTRUCTURES; SENSORS; AU; AG;
D O I
10.1002/elan.202060233
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Three-dimensional porous silicon framework (3D-pSi) integrated with various nanostructures is highly potential for functional devices usage such as micro fuel cells or sensing chips. For noble metal deposition in highly directional Si nanowire array or porous Si with large aspect ratios, one difficulty is the restriction on the depth of deposition available. Herein, we would like to introduce a facile route to enhance the integration of Pd nanoparticles with anisotropic Si porous structure. By converting Si nanowire array into 3D-pSi, the surface coverage of Pd nanoparticles is effectively improved as shown by scanning electron micrographs and cross-sectional element mapping data. The relative electrochemical active surface area is increased by 3.5 folds. In order to demonstrate the merits brought by this morphological evolution, the electrochemical sensing devices are prepared for detecting H2O2 in PBS solution. As shown by differential pulse voltammetry, the upper limit of linear range of detection can be raised from 6.30 mM to 14.95 mM. This approach may indicate an alternative for boosting the performance of future sensing chips with progressively limited die area, especially attractive for those scenarios where large dynamic range is favourable.
引用
收藏
页码:733 / 743
页数:11
相关论文
共 59 条
[1]   Hydrogen peroxide sensor based on in situ grown Pt nanoparticles from waste screen-printed electrodes [J].
Agrisuelas, Jeronimo ;
Gonzalez-Sanchez, Maria-Isabel ;
Valero, Edelmira .
SENSORS AND ACTUATORS B-CHEMICAL, 2017, 249 :499-505
[2]  
[Anonymous], 2017, ANGEW CHEM, V129, P639
[3]   A novel hierarchical 3D N-Co-CNT@NG nanocomposite electrode for non enzymatic glucose and hydrogen peroxide sensing applications [J].
Balamurugan, Jayaraman ;
Tran Duy Thanh ;
Karthikeyan, Gopalsamy ;
Kim, Nam Hoon ;
Lee, Joong Hee .
BIOSENSORS & BIOELECTRONICS, 2017, 89 :970-977
[4]   Chemical reduction of three-dimensional silica micro-assemblies into microporous silicon replicas [J].
Bao, Zhihao ;
Weatherspoon, Michael R. ;
Shian, Samuel ;
Cai, Ye ;
Graham, Phillip D. ;
Allan, Shawn M. ;
Ahmad, Gul ;
Dickerson, Matthew B. ;
Church, Benjamin C. ;
Kang, Zhitao ;
Abernathy, Harry W., III ;
Summers, Christopher J. ;
Liu, Meilin ;
Sandhage, Kenneth H. .
NATURE, 2007, 446 (7132) :172-175
[5]   Validation of the Compatibility Between a Porous Silicon-Based Gas Sensor Technology and Standard Microelectronic Process [J].
Barillaro, G. ;
Bruschi, P. ;
Lazzerini, G. M. ;
Strambini, L. M. .
IEEE SENSORS JOURNAL, 2010, 10 (04) :893-899
[6]  
Barillaro G., 2018, HDB POROUS SILICON, P1251
[7]  
Canham L.T., 2018, Handbook of Porous Silicon, VSecond, P4, DOI [10.1007/978-3-319-05744-6, DOI 10.1007/978-3-319-05744-6]
[8]   Electrochemical sensing of hydrogen peroxide using metal nanoparticles: a review [J].
Chen, Shihong ;
Yuan, Ruo ;
Chai, Yaqin ;
Hu, Fangxin .
MICROCHIMICA ACTA, 2013, 180 (1-2) :15-32
[9]   Recent advances in electrochemical sensing for hydrogen peroxide: a review [J].
Chen, Wei ;
Cai, Shu ;
Ren, Qiong-Qiong ;
Wen, Wei ;
Zhao, Yuan-Di .
ANALYST, 2012, 137 (01) :49-58
[10]   Controlled Microfabrication of High-Aspect-Ratio Structures in Silicon at the Highest Etching Rates: The Role of H2O2 in the Anodic Dissolution of Silicon in Acidic Electrolytes [J].
Cozzi, Chiara ;
Polito, Giovanni ;
Kolasinski, Kurt W. ;
Barillaro, Giuseppe .
ADVANCED FUNCTIONAL MATERIALS, 2017, 27 (06)