Large area interference lithography using a table-top extreme ultraviolet laser: a systematic study of the degree of mutual coherence

被引：14

作者：

Zuppella, P. ^{[1
]}

Luciani, D. ^{[1
]}

Tucceri, P. ^{[1
]}

De Marco, P. ^{[1
]}

Gaudieri, A. ^{[1
]}

Kaiser, J. ^{[2
]}

Ottaviano, L. ^{[1
]}

Santucci, S. ^{[1
]}

Reale, A. ^{[1
]}

机构：

[1] Univ Aquila, Dipartimento Fis, Gc LNGS INFN, I-67100 Laquila, Italy

[2] Brno Univ Technol, Inst Engn Phys, Brno 61669, Czech Republic

来源：

NANOTECHNOLOGY | 2009年 / 20卷 / 11期

关键词：

INTERFEROMETRIC LITHOGRAPHY; IMPRINT;

D O I：

10.1088/0957-4484/20/11/115303

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A prototype low cost table-top Ar capillary discharge laser source (1.5 ns pulse duration, lambda = 46.9 nm) was successfully used to produce, by means of interference lithography (with a simple Lloyd mirror setup), large area (0.1 mm(2)) regular patterns from 400 nm down to 22.5 nm (half-pitch) on PMMA/Si (PMMA: polymethylmethacrylate) substrates. The experiments allowed a systematical investigation of the degree of mutual coherence of the source, giving a clear indication that the interference lithography can be pushed down to the ultimate resolution limit of lambda/4.

引用

页数：4

共 4 条

[1] Extreme UltraViolet Holographic Lithography with a Table-top Laser
Isoyan, A.
Jiang, F.
Cheng, Y-C.
Wachulak, P.
Urbanski, L.
Rocca, J.
Menoni, C.
Marconi, M.
Cerrin, F.
ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES, 2009, 7271
[2] A study of the mechanical vibrations of a table-top extreme ultraviolet interference nanolithography tool
Prezioso, S.
De Marco, P.
Zuppella, P.
Santucci, S.
Ottaviano, L.
REVIEW OF SCIENTIFIC INSTRUMENTS, 2010, 81 (04)
[3] Invited Article: Progress in coherent lithography using table-top extreme ultraviolet lasers
Li, W.
Urbanski, L.
Marconi, M. C.
REVIEW OF SCIENTIFIC INSTRUMENTS, 2015, 86 (12)
[4] Defect-free periodic structures using extreme ultraviolet Talbot lithography in a table-top system
Li, Wei
Esquiroz, Victor Martinez
Urbanski, Lukasz
Patel, Dinesh
Menoni, Carmen S.
Marconi, Mario C.
Stein, Aaron
Chao, Weilun
Anderson, Erik H.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2013, 31 (06):

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