Soft magnetic materials application in the RF range

被引：88

作者：

Yamaguchi, Masahiro ^{[1
]}

Kim, Ki Hyeon ^{[1
]}

Ikedaa, Shinji ^{[1
]}

机构：

[1] Tohoku Univ, Dept Elect & Commun Engn, Aoba Ku, Sendai, Miyagi 9808579, Japan

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2006年 / 304卷 / 02期

关键词：

ferromagnetic resonance; patterned film; integrated inductor; taper etching; quality factor; noise suppressor;

D O I：

10.1016/j.jmmm.2006.02.143

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Recent rapid progress of information technologies has enlarged the application fields of soft magnetic materials operating in GHz range. Firstly, this paper reviews the recent achievement of magnetic thin films applied in high-frequency devices. Then, a newly developed permeability measurement technique is introduced, and then ferromagnetic RF integrated inductors and noise suppressors are discussed from an application viewpoint. In particular, the influences of alignment between the patterned magnetic films and coil legs on the characteristics of inductors are manifested. As a result, a quality factor of 13 in a "shift type" inductor at 1.2GHz was achieved. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：208 / 213

页数：6

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