A Capacitive Humidity Sensor Based on Multi-Wall Carbon Nanotubes (MWCNTs)

被引：117

作者：

Chen, Wei-Ping ^{[1
]}

Zhao, Zhen-Gang ^{[1
]}

Liu, Xiao-Wei ^{[1
]}

Zhang, Zhong-Xin ^{[1
]}

Suo, Chun-Guang ^{[1
]}

机构：

[1] Harbin Inst Technol, Dept Microelect, Harbin, Heilongjiang, Peoples R China

来源：

SENSORS | 2009年 / 9卷 / 09期

关键词：

capacitive sensor; humidity sensor; carbon nanotubes (CNTs); capillary condensation; CAPILLARY CONDENSATION; FILM;

D O I：

10.3390/s90907431

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A new type of capacitive humidity sensor is introduced in this paper. The sensor consists of two plate electrodes coated with MWCNT films and four pieces of isolating medium at the four corners of the sensor. According to capillary condensation, the capacitance signal of the sensor is sensitive to relative humidity (RH), which could be transformed to voltage signal by a capacitance to voltage converter circuit. The sensor is tested using different saturated saline solutions at the ambient temperature of 25 C, which yielded approximately 11% to 97% RH, respectively. The function of the MWCNT films, the effect of electrode distance, the temperature character and the repeatability of the sensor are discussed in this paper.

引用

页码：7431 / 7444

页数：14

共 26 条

[1] A ceramic thick film humidity sensor based on MnZn ferrite [J].

Arshaka, K ;

Twomey, K ;

Egan, D .

SENSORS, 2002, 2 (02) :50-61

[2] Carbon nanotube actuators [J].

Baughman, RH ;

Cui, CX ;

Zakhidov, AA ;

Iqbal, Z ;

Barisci, JN ;

Spinks, GM ;

Wallace, GG ;

Mazzoldi, A ;

De Rossi, D ;

Rinzler, AG ;

Jaschinski, O ;

Roth, S ;

Kertesz, M .

SCIENCE, 1999, 284 (5418) :1340-1344

[3] POROUS MATERIALS - STRUCTURE, PROPERTIES AND CAPILLARY PHENOMENA [J].

BOUCHER, EA .

JOURNAL OF MATERIALS SCIENCE, 1976, 11 (09) :1734-1750

[4] Nanoscale molecular-switch crossbar circuits [J].

Chen, Y ;

Jung, GY ;

Ohlberg, DAA ;

Li, XM ;

Stewart, DR ;

Jeppesen, JO ;

Nielsen, KA ;

Stoddart, JF ;

Williams, RS .

NANOTECHNOLOGY, 2003, 14 (04) :462-468

[5] Room temperature ammonia and humidity sensing using highly ordered nanoporous alumina films [J].

Dickey, EC ;

Varghese, OK ;

Ong, KG ;

Gong, DW ;

Paulose, M ;

Grimes, CA .

SENSORS, 2002, 2 (03) :91-110

[6] Theory of an all-carbon molecular switch [J].

Gutierrez, R ;

Fagas, G ;

Cuniberti, G ;

Grossmann, F ;

Schmidt, R ;

Richter, K .

PHYSICAL REVIEW B, 2002, 65 (11) :1-4

[7] HELICAL MICROTUBULES OF GRAPHITIC CARBON [J].

IIJIMA, S .

NATURE, 1991, 354 (6348) :56-58

[8] CNT sensors for detecting gases with low adsorption energy by ionization [J].

Kim, Seongjeen .

SENSORS, 2006, 6 (05) :503-513

[9] CMOS humidity sensor system using carbon nitride film as sensing materials [J].

Lee, Sung Pil ;

Lee, Ji Gong ;

Chowdhury, Shaestagir .

SENSORS, 2008, 8 (04) :2662-2672

[10] Synthesis and characterization of carbon nitride films for micro humidity sensors [J].

Lee, Sung Pil .

SENSORS, 2008, 8 (03) :1508-1518

← 1 2 3 →