Numerical simulations of vibration in phase-shifting interferometry

被引：53
|
作者：
deGroot, PJ
Deck, LL
机构：
[1] Zygo Corporation, Middlefield, CT, 06455, Laurel Brook Road
来源：
APPLIED OPTICS | 1996年 / 35卷 / 13期
关键词：
D O I：
10.1364/AO.35.002172
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Computer simulations predict the expected rms measurement error in a phase-shifting interferometer in the presence of mechanical vibrations. The simulations involve a numerical resolution of a nonlinear mathematical model and are performed over a range of vibrational frequencies and amplitudes for three different phase-shift algorithms. Experimental research with an interference microscope and comparison with analytical solutions verify the numerical model. (C) 1996 Optical Society of America
引用
收藏
页码：2172 / 2178
页数：7
相关论文
共 50 条
  • [31] Phase-shifting VU factorization for interferometry
    Escobar, Marco A.
    Estrada, Julio C.
    Vargas, Javier
    OPTICS AND LASERS IN ENGINEERING, 2020, 124
  • [32] Punctuated quadrature phase-shifting interferometry
    Deck, LL
    de Groot, PJ
    OPTICS LETTERS, 1998, 23 (01) : 19 - 21
  • [33] Chopping adaptive phase-shifting interferometry
    Zhao, Weirui
    Cao, Genrui
    Guangxue Xuebao/Acta Optica Sinica, 2002, 22 (07): : 858 - 862
  • [34] Antivibration technique in phase-shifting interferometry
    School of Photoelectric Technology, Nanjing University of Science and Technology, Nanjing 210094, China
    不详
    Guangxue Jishu, 2007, SUPPL. (164-167+170):
  • [35] A novel adaptive phase-shifting interferometry
    Zhao, WR
    Cao, GR
    Ma, JQ
    ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGY 2000, 2000, 4231 : 360 - 364
  • [36] Doppler phase-shifting interferometry and holography
    Yatagai, Toyohiko
    Barada, Daisuke
    HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS IV, 2010, 7848
  • [37] Phase-shifting laser feedback interferometry
    Ovryn, B
    Andrews, JH
    OPTICS LETTERS, 1998, 23 (14) : 1078 - 1080
  • [38] PROFILOMETRY BY POLARIZING PHASE-SHIFTING INTERFEROMETRY
    Garoi, F.
    ROMANIAN JOURNAL OF PHYSICS, 2019, 64 (7-8):
  • [39] Carrier phase-shifting moire interferometry
    Wang, Dongmei
    Fang, Ruhua
    Zhang, Xiuyin
    Guangzi Xuebao/Acta Photonica Sinica, 2001, 30 (11):
  • [40] Confocal simultaneous phase-shifting interferometry
    Zhao, Chenguang
    Tan, Jiubin
    Tang, Jianbo
    Liu, Tao
    Liu, Jian
    APPLIED OPTICS, 2011, 50 (05) : 655 - 661
12345