Numerical simulations of vibration in phase-shifting interferometry

Computer simulations predict the expected rms measurement error in a phase-shifting interferometer in the presence of mechanical vibrations. The simulations involve a numerical resolution of a nonlinear mathematical model and are performed over a range of vibrational frequencies and amplitudes for three different phase-shift algorithms. Experimental research with an interference microscope and comparison with analytical solutions verify the numerical model. (C) 1996 Optical Society of America