Femtosecond Laser Drilling of Copper: Modeling and Experiment Comparison

被引：3

作者：

Liu, Yi-Hsien ^{[1
]}

Cheng, Chung-Wei ^{[1
]}

Chen, Jinn-Kuen ^{[2
]}

机构：

[1] Natl Chiao Tung Univ, Dept Mech Engn, 1001 Ta Hsueh Rd, Hsinchu 300, Taiwan

[2] Univ Missouri, Dept Mech & Aerosp Engn, Columbia, MO 65211 USA

来源：

JOURNAL OF LASER MICRO NANOENGINEERING | 2020年 / 15卷 / 01期

关键词：

femtosecond laser; Drude-critical point model; two-temperature model; ABLATION; METALS; FLUENCE; THRESHOLD; PULSES;

D O I：

10.2961/jlmn.2020.01.2005

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This study experimentally and theoretically investigated the ablation of copper by a femtosecond green laser pulse of wavelength 515 nm and pulse duration 300 fs. The copper was processed by a single laser pulse with fluences up to 789 J/cm(2). A modified Drude-critical point (DCP) model that considers the temperature-dependent inter-band transition, a two-temperature model (TTM), two phase change models, and a phase explosion model were adopted to obtain the temperature-dependent properties and ablation depth. The simulated ablation depths by the proposed DCP-mod method were in better agreement with the experimental results than those by the conventional DCP model.

引用

页码：25 / 30

页数：6

共 31 条

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