Dynamic modeling of interactions between fields and matter in MEMS devices

被引：4
|
作者：
Zeng, K [1 ]
Liu, Z [1 ]
Korvink, JG [1 ]
机构：
[1] Univ Freiburg, IMTEK, D-79110 Freiburg, Germany
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2004年 / 10卷 / 05期
关键词：
D O I：
10.1007/s00542-004-0417-0
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this work, we propose an innovative and general mathematical modeling framework with Lagrangian functions of multi-coupled energy domains for MEMS devices in the material frame. Due to the advantage of material descriptions of continua and the uniformity of Lagrangians for different physical domains, this framework simplifies the numerical analyses of MEMS devices.
引用
收藏
页码：387 / 392
页数：6
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