A Novel Full-digital Voice Coil Motor Drive for Wafer Stage

被引：0

作者：

Pei, Le ^{[1
]}

Liu, Jiaxi ^{[1
]}

Chen, Qiming ^{[1
]}

Li, Liyi ^{[1
]}

机构：

[1] Harbin Inst Technol, Dept Elect Engn, Harbin, Peoples R China

来源：

2016 19TH INTERNATIONAL CONFERENCE ON ELECTRICAL MACHINES AND SYSTEMS (ICEMS 2016) | 2016年

关键词：

anti-disturbance controller; digital VCM drive; phase-shift modulation;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a novel full digital drive for voice coil motor (VCM) designed for the wafer stage (WS). Firstly, to suppress current ripple, the 5-level cascaded H-bridge switching power amplifier is put forward. Secondly, to resist external disturbances, a novel current control method based on proportional-integral (PI) control and Luenberger observer is proposed. Finally, the control method is simulated, the result indicates that the new control method showed greater robustness than traditional PI controller; the full-digital test bench is built, and current ripple is reduced to 1.3mA.

引用

页数：4

共 5 条

[1] Alessandri A., 2001, Hybrid Systems: Computation and Control. 4th International Workshop, HSCC 2001. Proceedings (Lecture Notes in Computer Science Vol.2034), P7
[2] Bathaee M, 2002, ICES 2002: 9TH IEEE INTERNATIONAL CONFERENCE ON ELECTRONICS, CIRCUITS AND SYSTEMS, VOLS I-111, CONFERENCE PROCEEDINGS, P437, DOI 10.1109/ICECS.2002.1046188
[3] Chen QM, 2014, INT C ELECTR MACH SY, P2242, DOI 10.1109/ICEMS.2014.7013857
[4] Moeini A, 2016, APPL POWER ELECT CO, P2019, DOI 10.1109/APEC.2016.7468145
[5] On-chip voice-coil motor driver for mobile auto-focus camera applications
Yang, Sung-Hyun
Sohn, Sung-Min
Hong, Kuk-Tae
Lee, Hyoung-Soo
Sohn, Bo-Ik
[J]. 2005 IEEE ASIAN SOLID-STATE CIRCUITS CONFERENCE, PROCEEDINGS OF TECHNICAL PAPERS, 2005, : 101 - 104

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