Berkovich nanoindentation on InP

被引:26
作者
Jian, Sheng-Rui [1 ]
Jang, Jason Shian-Ching [1 ]
机构
[1] I Shou Univ, Dept Mat Sci & Engn, Kaohsiung 840, Taiwan
关键词
InP; Nanoindentation; Focused ion beam; Micro-Raman; Cross-sectional transmission electron microscopy; TRANSMISSION ELECTRON-MICROSCOPY; GAN THIN-FILMS; MECHANICAL DEFORMATION; INDENTATION; LOAD; COATINGS; GAAS;
D O I
10.1016/j.jallcom.2009.04.052
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In this study, the pressure-induced deformation mechanisms of single-crystal InP(100) are investigated by using nanoindentation with a Berkovich diamond indenter, micro-Raman spectroscopy and the cross-sectional transmission electron microscopy (XTEM) techniques. The load-displacement curves show the multiple "pop-ins" phenomena during nanoindentation loading. The cracking patterns are found from the scanning electron microscopy (SEM) observations within the mechanically deformed regions. In addition, no evidence of nanoindentation-induced phase transformation is observed up to a maximum indentation load of 200 mN, as revealed from the micro-Raman spectra. Therefore, it is demonstrated that dislocations dominate the deformation mechanisms and, no phase transformation occurs. Form XTEM observations, the slip bands are oriented at an angle of 45, to the sample surface (100), indicating that slip deformation of lnP occurs within the {111} planes. The mechanical deformation processes are observed in InP closely related to the coupling of the dislocation-mediated; plasticity, nucleation and propagation of slip (twinning). (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:498 / 501
页数:4
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