Development of an auto test system for humidity sensors

被引：14
作者：
Feng, Yingliang [1 ]
Wang, Shujuan [1 ]
Feng, Bin [1 ]
Wang, Rui [1 ]
He, Yuan [1 ]
Zhang, Tong [1 ]
机构：
[1] Jilin Univ, Coll Elect Sci & Engn, State Key Lab Integrated Optoelect, Changchun 130012, Peoples R China
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2009年 / 152卷 / 01期
关键词：
Auto test system; Humidity sensing properties; LabVIEW; ZL5; Sensor; DATA ACQUISITION-SYSTEM; PURPOSE INTERFACE BUS; SENSITIVE PROPERTIES; SENSING PROPERTIES; ROOM-TEMPERATURE; THIN-FILMS; COMPOSITE; MICROMORPHOLOGY; TITANATE;
D O I：
10.1016/j.sna.2009.03.001
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Humidity sensors are fabricated on ceramic substrates with Ag-Pd interdigitated electrodes by loading ZnO nanorods as a sensing material. X-ray diffraction (XRD) and field-emission scanning electron microscopy (FE-SEM) are applied to characterize these ZnO nanorods. An auto test system is developed by connecting a ZL-5 model LCR analyzer and a PCI-GPIB interface. Several programs are designed using the LabVIEW environment to measure the humidity sensing properties of our sensors, such as response-recovery curves, capacitance characteristics, frequency properties, and complex impedance properties. The results make our system a good candidate in sensor investigations. (C) 2009 Published by Elsevier B.V.
引用
收藏
页码：104 / 109
页数：6
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