Backside contact effect on the morphological and optical features of porous silicon photonic crystals

被引：8

作者：

Huanca, Danilo Roque ^{[1
]}

Raimundo, Daniel Scodeler ^{[1
]}

Salcedo, Walter Jaimes ^{[1
]}

机构：

[1] Univ Sao Paulo, Microelect Lab, Dept Elect Engn, Escola Politecn, BR-05508900 Sao Paulo, Brazil

来源：

MICROELECTRONICS JOURNAL | 2009年 / 40卷 / 4-5期

关键词：

Porous silicon; Photonic crystal; Bragg's mirrors;

D O I：

10.1016/j.mejo.2008.11.005

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The present work reports on the effect of the type of backside contact used in the electrochemical process and their relation with the structural features and optical responses of the one-dimensional photonic crystal (PC) anodized in simple and double electrochemical cell. The PC, obtained in the single cell, showed to have thicker layers than of the PC obtained in double electrochemical cell. Additionally, the PC obtained in double cell showed highest reflectance in the band gap region than of the PCs obtained in single cell. These results suggest that the interface roughness between adjacent layers in the PC devices obtained in double electrochemical cell is minimized. (C) 2008 Elsevier Ltd. All rights reserved.

引用

页码：744 / 748

页数：5

共 7 条

[1] Porous silicon: a quantum sponge structure for silicon based optoelectronics [J].