Reducing aberration effect of Fourier transform lens by modifying Fourier spectrum of diffractive optical element in beam shaping optical system

被引：10

作者：

Zhang, Fang ^{[1
,2
]}

Zhu, Jing ^{[1
,2
]}

Song, Qiang ^{[1
,2
]}

Yue, Weirui ^{[1
,2
]}

Liu, Jingdan ^{[1
,3
]}

Wang, Jian ^{[1
,2
]}

Situ, Guohai ^{[1
,2
]}

Huang, Huijie ^{[1
,2
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China

[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China

[3] Beijing Inst Technol, Sch Optoelect, Beijing 100081, Peoples R China

来源：

APPLIED OPTICS | 2015年 / 54卷 / 30期

基金：

对外科技合作项目（国际科技项目）; 中国国家自然科学基金;

关键词：

DESIGN; ILLUMINATION; LITHOGRAPHY; TWEEZERS; PHASE; OPTIMIZATION; EFFICIENCY; ALGORITHM; STORAGE; IMAGE;

D O I：

10.1364/AO.54.008891

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In general, Fourier transform lenses are considered as ideal in the design algorithms of diffractive optical elements (DOEs). However, the inherent aberrations of a real Fourier transform lens disturb the far field pattern. The difference between the generated pattern and the expected design will impact the system performance. Therefore, a method for modifying the Fourier spectrum of DOEs without introducing other optical elements to reduce the aberration effect of the Fourier transform lens is proposed. By applying this method, beam shaping performance is improved markedly for the optical system with a real Fourier transform lens. The experiments carried out with a commercial Fourier transform lens give evidence for this method. The method is capable of reducing the system complexity as well as improving its performance. (C) 2015 Optical Society of America

引用

页码：8891 / 8898

页数：8

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