A Study of Fabry-Perot Optical MEMS Pressure Senor

被引：0

作者：

Ge, Yixian ^{[1
]}

Wang, Ming ^{[1
]}

Yan, Haitao ^{[1
]}

机构：

[1] Nanjing Normal Univ, Sch Phys Sci & Technol, Jiangsu Key Lab Optoelect Technol, Nanjing 210097, Peoples R China

来源：

2008 IEEE PHOTONICSGLOBAL@SINGAPORE (IPGC), VOLS 1 AND 2 | 2008年

关键词：

optical fiber sensor; F-P interference; MEMS; phase demodulation; mesa membrane;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The optical MEMS pressure sensor with a planar and mesa membrane is presented. The operating principle of the MEMS pressure sensor is expatiated by the Fabry-Parot (F-P) interference and the relation between deflection and pressure is analyzed. The fabrication of each diaphragm is described. A phase demodulation method based on a Fourier transformation is explored, which can reduce errors resulting from intensity variations of a light source. Experimental results demonstrate that the sensor has reasonable linearity, sensitivity, and a wide pressure measurement range.

引用

页码：150 / 153

页数：4

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