Assessment of the novel aerosol deposition method for room temperature preparation of metal oxide gas sensor films

被引：62

作者：

Sahner, K. ^{[1
]}

Kaspar, M. ^{[1
]}

Moos, R. ^{[1
]}

机构：

[1] Univ Bayreuth, Funct Mat Lab, D-95440 Bayreuth, Germany

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2009年 / 139卷 / 02期

关键词：

Cold spray; Strontium titanate; Oxygen sensor; RESISTIVE OXYGEN SENSORS; THICK-FILMS; SELECTIVITY ENHANCEMENT; HYDROCARBON SENSORS;

D O I：

10.1016/j.snb.2009.03.011

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Titania and SrTi0.7Fe0.3O3-delta sensor films were prepared by the novel aerosol deposition method at room temperature. In both cases, films with a good quality were obtained. The oxygen sensor characteristics of the devices were tested and found to be in perfect agreement with the literature. In the case of SrTi0.7Fe0.3O3-delta in particular, the aerosol deposited films did not require the additional diffusion barrier layer needed for screen-printed films, thus simplifying fabrication. In addition, propane sensitivity was determined as a function of the film thickness for the aerosol SrTi0.7Fe0.3O3-delta films. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：394 / 399

页数：6

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