Micromachined rectangular-coaxial transmission lines

被引:73
作者
Reid, J. Robert [1 ]
Marsh, Eric D. [1 ]
Webster, Richard T. [1 ]
机构
[1] USAF, Res Lab, Antenna Technol Branch, Hanscom AFB, MA 01731 USA
关键词
coplanar waveguides (CPWs); couplers; filters; microstrip; millimeter-wave circuits; resonators;
D O I
10.1109/TMTT.2006.879133
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Rectangular-coaxial (recta-coax) transmission lines fabricated through a three-dimensional micromachining process are presented. These lines, are shown to have significant advantages over competing integrated transmission lines such as microstrip and coplanar waveguides. Design equations are presented for impedance, loss, and frequency range. The equations are confirmed with simulations and measurements. The quality factor of shorted lambda/4 resonators is measured to be 156 at 60 GHz. This corresponds to a line loss of 0.353 dB/cm. Advantages of these lines for passive millimeter-wave circuits including ease of signal routing, high isolation, and signal crossovers are demonstrated with realized lines and couplers.
引用
收藏
页码:3433 / 3442
页数:10
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