Investigation of thermal recovery behavior in hydrogen-implanted SrTiO3 using high energy ion beam techniques

被引：7

作者：

Thevuthasan, S ^{[1
]}

Jiang, W ^{[1
]}

Young, JS ^{[1
]}

Weber, WJ ^{[1
]}

机构：

[1] Pacific NW Lab, Environm Mol Sci Lab, Richland, WA 99352 USA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2000年 / 161卷

关键词：

ion scattering; Rutherford backscattering spectrometry (RBS); nuclear reaction analysis (NRA); radiation effects; damage accumulation; strontium titanate (SrTiO3); hydrogen;

D O I：

10.1016/S0168-583X(99)00841-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Damage accumulation, recovery process, and the influence of hydrogen on the recovery process have been investigated in single crystal SrTiO3 irradiated with low-energy (40 keV) H+ using in-situ hydrogen nuclear reaction analysis (NRA) and Rutherford backscattering spectrometry/channeling (RBS/C) techniques. Samples were irradiated at a temperature of 120 It with ion fluences of 5.0 x 10(16) and 1.0 x 10(17) H+/cm(2). For annealing temperatures up to similar to 470 K, isochronal annealing results indicate increasing disorder on the Sr, Ti, and O sublattices with temperature in the vicinity of the implanted hydrogen for low fluences of 5.0 x 10(16) H+/cm(2). Annealing this sample above 570 K. resulted in the cleavage of the entire irradiated surface. On-the-other-hand, high-temperature isochronal annealing results for 1.0 x 10(17) H+/cm(2) fluence show an increase in the backscattering yield across the penetration depth of the implant hydrogen due to the formation of hydrogen blisters. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：544 / 548

页数：5

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