Evaluation of surface figure error profile of ellipsoidal mirror for soft X-ray focusing

被引：3
作者：
Takeo, Yoko [1 ]
Saito, Takahiro [1 ]
Mimura, Hidekazu [1 ]
机构：
[1] Univ Tokyo, Grad Sch Engn, Dept Precis Engn, Bunkyo Ku, Tokyo 1138656, Japan
来源：
ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS X | 2015年 / 9588卷
关键词：
Ellipsoidal mirror; X-ray focusing; Phase retrieval; Ptychography; Wavefront sensing; Figure measurement; Alignment; PHASE RETRIEVAL;
D O I：
10.1117/12.2188824
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
It is possible to achieve soft X-ray nanofocusing with a high efficiency and no chromatic aberration by using an ultraprecise ellipsoidal mirror. Surface figure metrology is key in the improvement of surface figure accuracy. In this study, we propose a ptychographic phase retrieval method using a visible light laser to measure the surface figure error profile of an ellipsoidal mirror. We introduce a simple experimental system for ptychographic phase retrieval and demonstrate the basic performance of the proposed system. Obtainable wavefront information provides both the figure error and the alignment of the ellipsoidal mirror that yield the best focusing. This developed method is required for offline adjustments when an ellipsoidal mirror is installed in the beamline of synchrotron radiation or X-ray free-electron laser light sources.
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页数：9
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