Hydrodechlorination of chloropentafluoroethane (CFC-115, CClF2CF3) was carried out over Pd catalysts supported on various carriers including carbon, alumina, silica gel, silica-alumina, titania, and kieselguhr. Among them, carbon was found to be the most selective support toward the formation of pentafluoroethane (HFC-125, CHF2CF3) and the most stable one against the catalyst deactivation. The catalyst deactivation was studied by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), textural characterization and chemical analysis of the catalyst samples.