Fracture behavior of single-crystal silicon microstructure coated with stepwise bias-graded a-C:H film

被引:13
作者
Xia, Yuanlin [1 ]
Hirai, Yoshikazu [1 ]
Tsuchiya, Toshiyuki [1 ]
机构
[1] Kyoto Univ, Dept Micro Engn, Kyoto 6158540, Japan
关键词
Tensile testing; Single crystal silicon; Hydrogenated amorphous carbon film; Coating-substrate system; Multilayer gradient coating; DIAMOND-LIKE CARBON; THIN-FILMS; TRIBOLOGICAL PROPERTIES; CREEP-BEHAVIOR; WEAR BEHAVIOR; DLC COATINGS; TOUGHNESS; COMPOSITE; VOLTAGE; DEPOSITION;
D O I
10.1016/j.surfcoat.2020.126559
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Fracture behavior in the tensile testing of a single-crystal silicon (SCS) microstructure with a stepwise biasgraded hydrogenated amorphous carbon (a-C:H) coating was investigated to explore the fracture mechanism of the coating-substrate system. All sides of the SCS microstructure (120 x 4 x 5 mu m(3)) were coated uniformly with a 300-nm-thick a-C:H film deposited by plasma enhanced chemical vapor deposition (PECVD). In this research, four different bias conditions with stepwise changes were applied during deposition to make the hard-compliant or compliant-hard gradient in the coating film. The microstructure, chemical composition, and mechanical properties were evaluated by scanning electron microscopy, Raman spectroscopy, nanoindentation, and surface profilometry. A tensile test showed a significant increase in tensile strength for samples with a multilayer gradient coating, which was 6.3-56.6% higher than that of the SCS sample, and a similar increase was observed for fracture toughness. The fracture mechanisms were elaborated by analyzing the chemical composition and stress intensity factor. The results indicate that the tensile behavior was strongly affected by the surface energy and stress state of the a-C:H coating.
引用
收藏
页数:9
相关论文
共 47 条
[1]   Mechanical properties and performance of magnetron-sputtered graded diamond-like carbon films with and without metal additions (vol 11, pg 1139, 2002) [J].
Bauer, C ;
Leiste, H ;
Stüber, M ;
Ulrich, S ;
Holleck, H .
DIAMOND AND RELATED MATERIALS, 2002, 11 (09) :1713-1713
[2]   CRACKING OF THIN BONDED FILMS IN RESIDUAL TENSION [J].
BEUTH, JL .
INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 1992, 29 (13) :1657-1675
[3]   Bias-graded deposition and tribological properties of Ti-contained a-C gradient composite film on Ti6Al4V alloy [J].
Cai, J. B. ;
Wang, X. L. ;
Bai, W. Q. ;
Zhao, X. Y. ;
Wang, T. Q. ;
Tu, J. P. .
APPLIED SURFACE SCIENCE, 2013, 279 :450-457
[4]   Prediction of the fracture toughness of a ceramic multilayer composite - Modeling and experiments [J].
Chen, C. R. ;
Pascual, J. ;
Fischer, F. D. ;
Kolednik, O. ;
Danzer, R. .
ACTA MATERIALIA, 2007, 55 (02) :409-421
[5]   Cracking in coating-substrate composites with multi-layered and FGM coatings [J].
Chi, SH ;
Chung, YL .
ENGINEERING FRACTURE MECHANICS, 2003, 70 (10) :1227-1243
[6]   Structural and mechanical properties of a-C:H and Si doped a-C:H thin films grown by LF-PECVD [J].
Chouquet, C. ;
Gerbaud, G. ;
Bardet, M. ;
Barrat, S. ;
Billard, A. ;
Sanchette, F. ;
Ducros, C. .
SURFACE & COATINGS TECHNOLOGY, 2010, 204 (9-10) :1339-1346
[7]   Substrate Bias Voltage Tailoring the Interfacial Chemistry of a-SiCx:H: A Surprising Improvement in Adhesion of a-C:H Thin Films Deposited on Ferrous Alloys Controlled by Oxygen [J].
Crespi, Angela E. ;
Leidens, Leonardo M. ;
Antunes, Vinicius ;
Perotti, Bruna L. ;
Michels, Alexandre F. ;
Alvarez, Fernando ;
Figueroa, Carlos A. .
ACS APPLIED MATERIALS & INTERFACES, 2019, 11 (19) :18024-18033
[8]   EDGE-BONDED DISSIMILAR ORTHOGONAL ELASTIC WEDGES UNDER NORMAL AND SHEAR LOADING [J].
DUNDURS, J ;
BOGY, DB .
JOURNAL OF APPLIED MECHANICS, 1969, 36 (03) :650-&
[9]   Analysis of instrumented indentation test data for functionally graded materials [J].
Fischer-Cripps, AC .
SURFACE & COATINGS TECHNOLOGY, 2003, 168 (2-3) :136-141
[10]   Stress relaxation and stability in thick amorphous carbon films deposited in layer structure [J].
Gioti, M ;
Logothetidis, S ;
Charitidis, C .
APPLIED PHYSICS LETTERS, 1998, 73 (02) :184-186