Thick-film magnetostrictive material for MEMS

被引：20

作者：

Grabham, NJ ^{[1
]}

White, NM ^{[1
]}

Beeby, SP ^{[1
]}

机构：

[1] Univ Southampton, Dept Elect & Comp Sci, Southampton SO17 1BJ, Hants, England

来源：

ELECTRONICS LETTERS | 2000年 / 36卷 / 04期

关键词：

D O I：

10.1049/el:20000264

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Initial studies on a novel thick-film magnetostrictive material are presented. The screen printable thick-film is based on the giant magnetostrictive material Terfenol-D. The development of the paste and of a suitable measurement system is described. Initial values for the magnetostriction of the thick-film are reported and compared with those of other composite magnetostrictive materials.

引用

页码：332 / 334

页数：3

共 9 条

[1] ANALYSIS OF AN INTERFEROMETRIC OPTICAL FIBER DETECTION TECHNIQUE APPLIED TO SILICON VIBRATING SENSORS
ANDRES, MV
TUDOR, MJ
FOULDS, KWH
[J]. ELECTRONICS LETTERS, 1987, 23 (15) : 774 - 775
[2] Magnetostrictive particulate actuators: configuration, modeling and characterization
Anjanappa, M
Wu, YF
[J]. SMART MATERIALS & STRUCTURES, 1997, 6 (04) : 393 - 402
[3] Thick film PZT/micromachined silicon accelerometer
Beeby, SP
Ross, N
White, NM
[J]. ELECTRONICS LETTERS, 1999, 35 (23) : 2060 - 2062
[4] SENSOR APPLICATIONS OF THICK-FILM TECHNOLOGY
BRIGNELL, JE
WHITE, NM
CRANNY, AWJ
[J]. IEE PROCEEDINGS-I COMMUNICATIONS SPEECH AND VISION, 1988, 135 (04): : 77 - 84
[5] A novel micropump design with thick-film piezoelectric actuation
Koch, M
Harris, N
Maas, R
Evans, AGR
White, NM
Brunnschweiler, A
[J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 1997, 8 (01) : 49 - 57
[6] McMasters OD, 1995, J RARE EARTH, V13, P295
[7] MEMS actuators based on smart film materials
Quandt, E
[J]. MICROMACHINED DEVICES AND COMPONENTS IV, 1998, 3514 : 136 - 146
[8] MAGNETOSTRICTION, ELASTIC-MODULI, AND COUPLING FACTORS OF COMPOSITE TERFENOL-D
SANDLUND, L
FAHLANDER, M
CEDELL, T
CLARK, AE
RESTORFF, JB
WUNFOGLE, M
[J]. JOURNAL OF APPLIED PHYSICS, 1994, 75 (10) : 5656 - 5658
[9] White N., 1987, Hybrid Circuits, P32

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