[1] Univ Freiburg, Lab MEMS Applicat IMTEK, Dept Microsyst Engn, Georges Koehler Allee 103, D-79110 Freiburg, Germany
[2] Univ Freiburg, Inst & Freiburg Ctr Interact Mat & Bioinspired Te, Georges Koehler Allee 105, D-79110 Freiburg, Germany
[3] Simon Fraser Univ, Dept Chem, 8888 Univ Dr, Burnaby, BC V5A 1S6, Canada
[4] Friedrich Alexander Univ Erlangen Nurnberg, Dept Chem & Biol Engn, Egerlandstr 3, D-91058 Erlangen, Germany
[5] Hahn Schickard, Georges Koehler Allee 103, D-79110 Freiburg, Germany
[6] Forschungszentrum Julich, Helmholtz Inst Erlangen Nurnberg Renewable Energy, Egerlandstr 3, D-91058 Erlangen, Germany