Characterization of materials' nanomechanical properties by force modulation and phase imaging atomic force microscopy with soft cantilevers

Soft cantilevers, although having good force sensitivity, have found limited use for investigating materials' nanomechanical properties by conventional force modulation (FM) and intermittent contact (IC) atomic force microscopy. This is due to the low forces and small indentations that these cantilevers are able to exert on the surface, and to the high amplitudes required to overcome adhesion to the surface. In this paper, it is shown that imaging of local elastic properties of surface and subsurface layers can be carried out by employing electrostatic forcing of the cantilever. In addition, by mechanically exciting the higher vibration modes in contact with the surface and monitoring the phase of vibrations, the contrast due to local surface elasticity is obtained. (C) 2002 Elsevier Science Inc. All rights reserved.