Optimization of ALD grown Ni-, Co- and Fe-doped ZnO films

被引：1

作者：

Blagoev, B. ^{[1
]}

Terziyska, P. ^{[1
]}

Mehandzhiev, V ^{[1
]}

Tzvetkov, P. ^{[2
]}

Kovacheva, D. ^{[2
]}

Avramova, I ^{[2
]}

Ivanova, T. ^{[3
]}

Gesheva, K. ^{[3
]}

Paskaleva, A. ^{[1
]}

机构：

[1] Bulgarian Acad Sci, G Nadjakov Inst Solid State Phys, 72 Tzarigradsko Chaussee, Sofia 1784, Bulgaria

[2] Bulgarian Acad Sci, Inst Gen & Inorgan Chem, Acad G Bonchev Str,Bl 10, Sofia 1113, Bulgaria

[3] Bulgarian Acad Sci, Cent Lab Solar Energy & New Energy Sources, 72 Tzarigradsko Chaussee, Sofia 1784, Bulgaria

来源：

21ST INTERNATIONAL SUMMER SCHOOL ON VACUUM, ELECTRON AND ION TECHNOLOGIES | 2020年 / 1492卷

关键词：

MAGNETIC-PROPERTIES; FERROMAGNETISM; TEMPERATURE;

D O I：

10.1088/1742-6596/1492/1/012053

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ni-, Co- and Fe-doped ZnO films were grown by atomic layer deposition on Si and glass substrates. The structures prepared were studied and characterized by XRD, XPS, ellipsometry and FTIR. The crystalline ZnO structure showed a strong dependence on the substrate used and the type of transition metal ion despite of the low doping levels.

引用

页数：5

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