Modeling, Parametric Synthesis and Characterization of Bellow-Type Pneumatic Micro-actuator

Pneumatic micro-actuators present unique advantages such as high force to volume ratio, tunable to get desired force vs displacement characteristics, free from high voltages, to list a few. Among several types of pneumatic actuators bellow type actuators presented recently are more conducive for MEMS fabrication. This paper presents extensive parametric analysis of these actuators to finally generate design and synthesis curves in terms of non-dimensional parameters. Analysis is carried out with finite element method (FEM); based on results and physical insights, nondimensional parameter for synthesis are identified. Results are presented as design curves in non-dimensional parameters in such a way that based on desired force displacement curve users can converge on parameters without a need for further FEM for their specific case. Results show interesting possibilities of large variety of desired " force-displacement curves" spanning feasible range of parameters. One specific case is considered for fabrication of this bellow type pneumatic actuator and its characterization validates the proposed design analysis.