0.13-μm 32-Mb/64-Mb embedded DRAM core with high efficient redundancy and enhanced testability

被引:1
|
作者
Kikukawa, H [1 ]
Tomishima, S
Tsuji, T
Kawasaki, T
Sakamoto, S
Ishikawa, M
Abe, W
Tanizaki, H
Kato, H
Uchikoba, T
Inokuchi, T
Senoh, M
Fukushima, Y
Niiro, M
Maruta, M
Shibayama, A
Ooishi, T
Takahashi, K
Hidaka, H
机构
[1] Matsushita Elect Ind Co Ltd, Adv LSI Technol Dev Ctr, Semicond Co, Kyoto 6178520, Japan
[2] Mitsubishi Electr Corp, Itami, Hyogo 6648641, Japan
[3] Mitsubishi Elect Engn Co Ltd, Itami, Hyogo 6648641, Japan
关键词
DRAM; embedded; redundancy; SOC; system LSI; test;
D O I
10.1109/JSSC.2002.1015693
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper describes the 32-Mb and the 64-Mb embedded DRAM core with high efficient redundancy, which is fabricated using 0.13-mum triple-well 4-level Cu embedded DRAM technology. Core size of 18.9 mm(2) and cell efficiency of 51.3% for the 32-Mb capacity, and core size of 33.4 mm(2) and cell efficiency of 58.1% for the 64-Mb capacity are realized. This core can achieve 230-MHz burst access at 1.0-V power-supply condition by adopting a new data bus architecture: merged shift column redundancy. We implemented four test functions to improve the testability of the embedded DRAM core. It realizes the DRAM core test in a logic test environment.
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页码:932 / 940
页数:9
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