0.13-μm 32-Mb/64-Mb embedded DRAM core with high efficient redundancy and enhanced testability
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作者:
Kikukawa, H
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Matsushita Elect Ind Co Ltd, Adv LSI Technol Dev Ctr, Semicond Co, Kyoto 6178520, JapanMatsushita Elect Ind Co Ltd, Adv LSI Technol Dev Ctr, Semicond Co, Kyoto 6178520, Japan
Kikukawa, H
[1
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Tomishima, S
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机构:Matsushita Elect Ind Co Ltd, Adv LSI Technol Dev Ctr, Semicond Co, Kyoto 6178520, Japan
Tomishima, S
Tsuji, T
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Tsuji, T
Kawasaki, T
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Kawasaki, T
Sakamoto, S
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Sakamoto, S
Ishikawa, M
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Ishikawa, M
Abe, W
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Abe, W
Tanizaki, H
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Tanizaki, H
Kato, H
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Kato, H
Uchikoba, T
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Uchikoba, T
Inokuchi, T
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Inokuchi, T
Senoh, M
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Senoh, M
Fukushima, Y
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Fukushima, Y
Niiro, M
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Niiro, M
Maruta, M
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Maruta, M
Shibayama, A
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Shibayama, A
Ooishi, T
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Ooishi, T
Takahashi, K
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Takahashi, K
Hidaka, H
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机构:Matsushita Elect Ind Co Ltd, Adv LSI Technol Dev Ctr, Semicond Co, Kyoto 6178520, Japan
Hidaka, H
机构:
[1] Matsushita Elect Ind Co Ltd, Adv LSI Technol Dev Ctr, Semicond Co, Kyoto 6178520, Japan
[2] Mitsubishi Electr Corp, Itami, Hyogo 6648641, Japan
[3] Mitsubishi Elect Engn Co Ltd, Itami, Hyogo 6648641, Japan
DRAM;
embedded;
redundancy;
SOC;
system LSI;
test;
D O I:
10.1109/JSSC.2002.1015693
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
This paper describes the 32-Mb and the 64-Mb embedded DRAM core with high efficient redundancy, which is fabricated using 0.13-mum triple-well 4-level Cu embedded DRAM technology. Core size of 18.9 mm(2) and cell efficiency of 51.3% for the 32-Mb capacity, and core size of 33.4 mm(2) and cell efficiency of 58.1% for the 64-Mb capacity are realized. This core can achieve 230-MHz burst access at 1.0-V power-supply condition by adopting a new data bus architecture: merged shift column redundancy. We implemented four test functions to improve the testability of the embedded DRAM core. It realizes the DRAM core test in a logic test environment.