1.3 μm-wavelength phase-locked VCSEL arrays incorporating patterned tunnel junction

被引:19
作者
Mutter, Lukas [1 ]
Iakovlev, Vladimir [1 ]
Caliman, Andrei [1 ]
Mereuta, Alexandru [1 ]
Sirbu, Alexei [1 ]
Kapon, Eli [1 ]
机构
[1] Ecole Polytech Fed Lausanne, Lab Phys Nanostruct, CH-1015 Lausanne, Switzerland
关键词
SURFACE-EMITTING LASERS; HIGH-POWER; CAVITY; DEVICES;
D O I
10.1364/OE.17.008558
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We report the fabrication and the performance of phase-locked VCSEL arrays emitting near 1310 nm wavelength. The arrays were fabricated using double wafer fusion by patterning a tunnel junction layer, which serves to define the individual single mode array elements. Phase-locking in both one-dimensional and two-dimensional array configurations was confirmed by means of far field and spectral measurements as well as theoretical modeling. CW output powers of more than 12 mW were achieved. (C) 2009 Optical Society of America
引用
收藏
页码:8558 / 8566
页数:9
相关论文
共 19 条
[1]   Mode discrimination in vertical-cavity surface-emitting lasers including Bragg reflectors and limiting apertures [J].
Achtenhagen, M ;
Hardy, A ;
Kapon, E .
OPTICAL ENGINEERING, 2005, 44 (10)
[2]  
[Anonymous], 2008, Introduction to Fourier optics
[3]   Low-resistivity p-side contacts for InP-based devices using buried InGaAs tunnel junction [J].
Arzberger, M ;
Lohner, M ;
Böhm, G ;
Amann, MC .
ELECTRONICS LETTERS, 2000, 36 (01) :87-88
[4]   PHASE-COUPLED 2-DIMENSIONAL ALXGA1-XAS-GAAS VERTICAL-CAVITY SURFACE-EMITTING LASER ARRAY [J].
DEPPE, DG ;
VANDERZIEL, JP ;
CHAND, N ;
ZYDZIK, GJ ;
CHU, SNG .
APPLIED PHYSICS LETTERS, 1990, 56 (21) :2089-2091
[5]   High-power single-mode vertical-cavity surface-emitting lasers with triangular holey structure [J].
Furukawa, A ;
Sasaki, S ;
Hoshi, M ;
Matsuzono, A ;
Moritoh, K ;
Baba, T .
APPLIED PHYSICS LETTERS, 2004, 85 (22) :5161-5163
[6]   High-power VCSEL's:: Single devices and densely packed 2-D-arrays [J].
Grabherr, M ;
Miller, M ;
Jäger, R ;
Michalzik, R ;
Martin, U ;
Unold, HJ ;
Ebeling, KJ .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 1999, 5 (03) :495-502
[7]   High-Power Single Transverse Mode Vertical-Cavity Surface-Emitting Lasers With Monolithically Integrated Curved Dielectric Mirrors [J].
Kardosh, Ihab ;
Demaria, Frank ;
Rinaldi, Fernando ;
Menzel, Susanne ;
Michalzik, Rainer .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2008, 20 (21-24) :2084-2086
[8]   Two-dimensional electronic beam-steering with implant-defined coherent VCSEL arrays [J].
Lehman, A. C. ;
Siriani, D. F. ;
Choquette, K. D. .
ELECTRONICS LETTERS, 2007, 43 (22) :1202-1203
[9]   One- and two-dimensional coherently coupled implant-defined vertical-cavity laser Arrays [J].
Lehman, Ann C. ;
Choquette, Kent D. .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2007, 19 (17-20) :1421-1423
[10]  
LUNDEBERG LDA, 2007, APPL PHYS LETT, V90, P3