Modeling a piezoelectric actuator using a transformer equivalent circuit

被引：0

作者：

Oms-Elisabelar, F ^{[1
]}

Bergaud, C ^{[1
]}

Nicu, L ^{[1
]}

Martinez, A ^{[1
]}

机构：

[1] CNRS, Lab Anal & Architecture Syst, F-31077 Toulouse 4, France

来源：

1999 INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS | 1999年

关键词：

Equivalent Circuit; global simulation; Piezoelectric Actuator; MEMS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we describe both the static and dynamic behaviors of an AFM-like piezoelectric actuator using a transformer equivalent circuit in which both the electrical and mechanical portions are represented by electrical equivalencies. The equivalent circuit is developed starting from electromechanical transduction principles and included in a commercial SPICE package. Analytical and simulated results are compared and found in good agreement both for static and dynamic analysis.

引用

页码：249 / 253

页数：5

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